Matches in SemOpenAlex for { <https://semopenalex.org/work/W1942577979> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W1942577979 abstract "EB/DUV intra-level mix and match (ILM&M) will make possible realization of both patterning finer than is attainable with DUV lithography and throughput higher than in the case of exposure only by EB writer. In order to realize the EB/DUV-ILM&M, the following two problems must be overcome. (1) The final size of the DUV exposed pattern is changed due to the influence of the position of EB exposed pattern, because of exposure to widely distributed back-scattered electrons. (2) Patterns exposed respectively by EB and DUV are separated or overlapped, due to moving of wafers in and out of each exposure apparatus, and their different registration methods. These problems make it very difficult to fabricate electronic devices that operate satisfactorily. Therefore, simulation of the ILM&M process is a prerequisite for fruitful examination of fabrication in the presence of these problems. We developed a lithography simulator corresponding to the EB/DUV-ILM&M process." @default.
- W1942577979 created "2016-06-24" @default.
- W1942577979 creator A5006923705 @default.
- W1942577979 creator A5008520354 @default.
- W1942577979 creator A5031599438 @default.
- W1942577979 creator A5038566462 @default.
- W1942577979 creator A5045932804 @default.
- W1942577979 creator A5078328913 @default.
- W1942577979 date "2003-01-20" @default.
- W1942577979 modified "2023-09-22" @default.
- W1942577979 title "Lithography simulator for EB/DUV intra-level mix and match" @default.
- W1942577979 doi "https://doi.org/10.1109/imnc.1999.797465" @default.
- W1942577979 hasPublicationYear "2003" @default.
- W1942577979 type Work @default.
- W1942577979 sameAs 1942577979 @default.
- W1942577979 citedByCount "0" @default.
- W1942577979 crossrefType "proceedings-article" @default.
- W1942577979 hasAuthorship W1942577979A5006923705 @default.
- W1942577979 hasAuthorship W1942577979A5008520354 @default.
- W1942577979 hasAuthorship W1942577979A5031599438 @default.
- W1942577979 hasAuthorship W1942577979A5038566462 @default.
- W1942577979 hasAuthorship W1942577979A5045932804 @default.
- W1942577979 hasAuthorship W1942577979A5078328913 @default.
- W1942577979 hasConcept C105795698 @default.
- W1942577979 hasConcept C111919701 @default.
- W1942577979 hasConcept C120665830 @default.
- W1942577979 hasConcept C121332964 @default.
- W1942577979 hasConcept C136525101 @default.
- W1942577979 hasConcept C142724271 @default.
- W1942577979 hasConcept C157764524 @default.
- W1942577979 hasConcept C160671074 @default.
- W1942577979 hasConcept C171250308 @default.
- W1942577979 hasConcept C192562407 @default.
- W1942577979 hasConcept C200274948 @default.
- W1942577979 hasConcept C204223013 @default.
- W1942577979 hasConcept C204787440 @default.
- W1942577979 hasConcept C2779227376 @default.
- W1942577979 hasConcept C2781089630 @default.
- W1942577979 hasConcept C33923547 @default.
- W1942577979 hasConcept C41008148 @default.
- W1942577979 hasConcept C49040817 @default.
- W1942577979 hasConcept C53524968 @default.
- W1942577979 hasConcept C555944384 @default.
- W1942577979 hasConcept C71924100 @default.
- W1942577979 hasConcept C76155785 @default.
- W1942577979 hasConcept C98045186 @default.
- W1942577979 hasConceptScore W1942577979C105795698 @default.
- W1942577979 hasConceptScore W1942577979C111919701 @default.
- W1942577979 hasConceptScore W1942577979C120665830 @default.
- W1942577979 hasConceptScore W1942577979C121332964 @default.
- W1942577979 hasConceptScore W1942577979C136525101 @default.
- W1942577979 hasConceptScore W1942577979C142724271 @default.
- W1942577979 hasConceptScore W1942577979C157764524 @default.
- W1942577979 hasConceptScore W1942577979C160671074 @default.
- W1942577979 hasConceptScore W1942577979C171250308 @default.
- W1942577979 hasConceptScore W1942577979C192562407 @default.
- W1942577979 hasConceptScore W1942577979C200274948 @default.
- W1942577979 hasConceptScore W1942577979C204223013 @default.
- W1942577979 hasConceptScore W1942577979C204787440 @default.
- W1942577979 hasConceptScore W1942577979C2779227376 @default.
- W1942577979 hasConceptScore W1942577979C2781089630 @default.
- W1942577979 hasConceptScore W1942577979C33923547 @default.
- W1942577979 hasConceptScore W1942577979C41008148 @default.
- W1942577979 hasConceptScore W1942577979C49040817 @default.
- W1942577979 hasConceptScore W1942577979C53524968 @default.
- W1942577979 hasConceptScore W1942577979C555944384 @default.
- W1942577979 hasConceptScore W1942577979C71924100 @default.
- W1942577979 hasConceptScore W1942577979C76155785 @default.
- W1942577979 hasConceptScore W1942577979C98045186 @default.
- W1942577979 hasLocation W19425779791 @default.
- W1942577979 hasOpenAccess W1942577979 @default.
- W1942577979 hasPrimaryLocation W19425779791 @default.
- W1942577979 hasRelatedWork W1169581196 @default.
- W1942577979 hasRelatedWork W1967752359 @default.
- W1942577979 hasRelatedWork W1984320199 @default.
- W1942577979 hasRelatedWork W2033024207 @default.
- W1942577979 hasRelatedWork W2035087663 @default.
- W1942577979 hasRelatedWork W2036933752 @default.
- W1942577979 hasRelatedWork W2038869283 @default.
- W1942577979 hasRelatedWork W2071914429 @default.
- W1942577979 hasRelatedWork W2083654583 @default.
- W1942577979 hasRelatedWork W2092513985 @default.
- W1942577979 hasRelatedWork W2188327119 @default.
- W1942577979 hasRelatedWork W2328746449 @default.
- W1942577979 hasRelatedWork W2544930214 @default.
- W1942577979 hasRelatedWork W2770708242 @default.
- W1942577979 hasRelatedWork W3083587361 @default.
- W1942577979 hasRelatedWork W3105576776 @default.
- W1942577979 hasRelatedWork W3213728446 @default.
- W1942577979 hasRelatedWork W69224963 @default.
- W1942577979 hasRelatedWork W2753932977 @default.
- W1942577979 hasRelatedWork W2848205054 @default.
- W1942577979 isParatext "false" @default.
- W1942577979 isRetracted "false" @default.
- W1942577979 magId "1942577979" @default.
- W1942577979 workType "article" @default.