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- W1946080780 abstract "A new ferroelectrics-silicon integrated microphone and microspeaker is proposed. The Pt/Pb(Zr,Ti)O/sub 3//Pt/SiO/sub 2//Si/sub 3/N/sub 4/ cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are very high. The new integrated microphone and microspeaker will be valuable for high quality micro-acoustic devices." @default.
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- W1946080780 date "2002-11-11" @default.
- W1946080780 modified "2023-09-27" @default.
- W1946080780 title "Design of a new ferroelectrics-silicon integrated microphone and microspeaker" @default.
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- W1946080780 doi "https://doi.org/10.1109/isaf.2000.942459" @default.
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