Matches in SemOpenAlex for { <https://semopenalex.org/work/W1946396893> ?p ?o ?g. }
- W1946396893 abstract "A new process for wafer scale integration of GaAs optoelectronic devices with Si integrated circuits has been investigated, based on low temperature bonding of epitaxial GaAs wafers onto planarized fully processed CMOS/BiCMOS wafers. The basic process flow and the most important aspects of the work concerning the III-V material and devices are presented." @default.
- W1946396893 created "2016-06-24" @default.
- W1946396893 creator A5006201862 @default.
- W1946396893 creator A5011032255 @default.
- W1946396893 creator A5059378344 @default.
- W1946396893 creator A5072519345 @default.
- W1946396893 creator A5074291981 @default.
- W1946396893 creator A5075638648 @default.
- W1946396893 creator A5079734927 @default.
- W1946396893 creator A5082614261 @default.
- W1946396893 creator A5090878487 @default.
- W1946396893 date "2002-11-13" @default.
- W1946396893 modified "2023-09-26" @default.
- W1946396893 title "III-V material and device aspects for the monolithic integration of GaAs devices on Si using GaAs/Si low temperature wafer bonding" @default.
- W1946396893 cites W1588263248 @default.
- W1946396893 cites W1985618254 @default.
- W1946396893 cites W1988662540 @default.
- W1946396893 cites W1991154868 @default.
- W1946396893 cites W1996577004 @default.
- W1946396893 cites W2005406798 @default.
- W1946396893 cites W2009107879 @default.
- W1946396893 cites W2010896246 @default.
- W1946396893 cites W2015823572 @default.
- W1946396893 cites W2037942853 @default.
- W1946396893 cites W2038273061 @default.
- W1946396893 cites W2075479685 @default.
- W1946396893 cites W2085753276 @default.
- W1946396893 cites W2102271847 @default.
- W1946396893 cites W2117071941 @default.
- W1946396893 cites W2126895344 @default.
- W1946396893 cites W2163920650 @default.
- W1946396893 doi "https://doi.org/10.1109/smicnd.2001.967455" @default.
- W1946396893 hasPublicationYear "2002" @default.
- W1946396893 type Work @default.
- W1946396893 sameAs 1946396893 @default.
- W1946396893 citedByCount "4" @default.
- W1946396893 crossrefType "proceedings-article" @default.
- W1946396893 hasAuthorship W1946396893A5006201862 @default.
- W1946396893 hasAuthorship W1946396893A5011032255 @default.
- W1946396893 hasAuthorship W1946396893A5059378344 @default.
- W1946396893 hasAuthorship W1946396893A5072519345 @default.
- W1946396893 hasAuthorship W1946396893A5074291981 @default.
- W1946396893 hasAuthorship W1946396893A5075638648 @default.
- W1946396893 hasAuthorship W1946396893A5079734927 @default.
- W1946396893 hasAuthorship W1946396893A5082614261 @default.
- W1946396893 hasAuthorship W1946396893A5090878487 @default.
- W1946396893 hasConcept C110738630 @default.
- W1946396893 hasConcept C119599485 @default.
- W1946396893 hasConcept C127413603 @default.
- W1946396893 hasConcept C134146338 @default.
- W1946396893 hasConcept C160671074 @default.
- W1946396893 hasConcept C171250308 @default.
- W1946396893 hasConcept C192562407 @default.
- W1946396893 hasConcept C24326235 @default.
- W1946396893 hasConcept C2778638305 @default.
- W1946396893 hasConcept C2779133538 @default.
- W1946396893 hasConcept C2779227376 @default.
- W1946396893 hasConcept C46362747 @default.
- W1946396893 hasConcept C49040817 @default.
- W1946396893 hasConcept C510052550 @default.
- W1946396893 hasConcept C530198007 @default.
- W1946396893 hasConceptScore W1946396893C110738630 @default.
- W1946396893 hasConceptScore W1946396893C119599485 @default.
- W1946396893 hasConceptScore W1946396893C127413603 @default.
- W1946396893 hasConceptScore W1946396893C134146338 @default.
- W1946396893 hasConceptScore W1946396893C160671074 @default.
- W1946396893 hasConceptScore W1946396893C171250308 @default.
- W1946396893 hasConceptScore W1946396893C192562407 @default.
- W1946396893 hasConceptScore W1946396893C24326235 @default.
- W1946396893 hasConceptScore W1946396893C2778638305 @default.
- W1946396893 hasConceptScore W1946396893C2779133538 @default.
- W1946396893 hasConceptScore W1946396893C2779227376 @default.
- W1946396893 hasConceptScore W1946396893C46362747 @default.
- W1946396893 hasConceptScore W1946396893C49040817 @default.
- W1946396893 hasConceptScore W1946396893C510052550 @default.
- W1946396893 hasConceptScore W1946396893C530198007 @default.
- W1946396893 hasLocation W19463968931 @default.
- W1946396893 hasOpenAccess W1946396893 @default.
- W1946396893 hasPrimaryLocation W19463968931 @default.
- W1946396893 hasRelatedWork W1963564810 @default.
- W1946396893 hasRelatedWork W1972848894 @default.
- W1946396893 hasRelatedWork W1989772688 @default.
- W1946396893 hasRelatedWork W2021980560 @default.
- W1946396893 hasRelatedWork W2026442246 @default.
- W1946396893 hasRelatedWork W2035692976 @default.
- W1946396893 hasRelatedWork W2075062273 @default.
- W1946396893 hasRelatedWork W2115618138 @default.
- W1946396893 hasRelatedWork W2116193184 @default.
- W1946396893 hasRelatedWork W2145430775 @default.
- W1946396893 hasRelatedWork W2145699422 @default.
- W1946396893 hasRelatedWork W2148003717 @default.
- W1946396893 hasRelatedWork W2171956588 @default.
- W1946396893 hasRelatedWork W2297963791 @default.
- W1946396893 hasRelatedWork W2736480330 @default.
- W1946396893 hasRelatedWork W3143504578 @default.
- W1946396893 hasRelatedWork W1520699020 @default.
- W1946396893 hasRelatedWork W2402088310 @default.
- W1946396893 hasRelatedWork W2406100138 @default.
- W1946396893 hasRelatedWork W2959794857 @default.
- W1946396893 isParatext "false" @default.