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- W1956411094 abstract "We have studied the behavior of metal impurities such as Cu and Ni with different isolation techniques in ULSI devices. We have found that the stress at a shallow trench isolation (STI) structure is larger than that of a local-oxidation-of-silicon (LOCOS) structure by using convergent beam electron diffraction (CBED). With LOCOS, the highly doped substrate efficiently gettered Cu. However, with STI, a small amount of Cu diffused to the device area due to the high stress. On the other hand, the high density of bulk micro defects (BMD) generated with the thermal processing of STI effectively getters Ni impurities. With the LOCOS-based wafer, a large amount of Ni diffuses to the device region because of the low BMD density." @default.
- W1956411094 created "2016-06-24" @default.
- W1956411094 creator A5014493260 @default.
- W1956411094 creator A5026364954 @default.
- W1956411094 creator A5032800406 @default.
- W1956411094 creator A5078374566 @default.
- W1956411094 date "2002-11-13" @default.
- W1956411094 modified "2023-09-27" @default.
- W1956411094 title "Study of metal impurities behavior due to difference in isolation structure on ULSI devices" @default.
- W1956411094 cites W1969052642 @default.
- W1956411094 cites W1970134844 @default.
- W1956411094 cites W1993665724 @default.
- W1956411094 cites W2044564131 @default.
- W1956411094 cites W2077943673 @default.
- W1956411094 doi "https://doi.org/10.1109/relphy.2001.922918" @default.
- W1956411094 hasPublicationYear "2002" @default.
- W1956411094 type Work @default.
- W1956411094 sameAs 1956411094 @default.
- W1956411094 citedByCount "0" @default.
- W1956411094 crossrefType "proceedings-article" @default.
- W1956411094 hasAuthorship W1956411094A5014493260 @default.
- W1956411094 hasAuthorship W1956411094A5026364954 @default.
- W1956411094 hasAuthorship W1956411094A5032800406 @default.
- W1956411094 hasAuthorship W1956411094A5078374566 @default.
- W1956411094 hasConcept C105066941 @default.
- W1956411094 hasConcept C125099081 @default.
- W1956411094 hasConcept C155310634 @default.
- W1956411094 hasConcept C159985019 @default.
- W1956411094 hasConcept C160671074 @default.
- W1956411094 hasConcept C178790620 @default.
- W1956411094 hasConcept C185592680 @default.
- W1956411094 hasConcept C191897082 @default.
- W1956411094 hasConcept C192562407 @default.
- W1956411094 hasConcept C195114451 @default.
- W1956411094 hasConcept C26953177 @default.
- W1956411094 hasConcept C2779227376 @default.
- W1956411094 hasConcept C49040817 @default.
- W1956411094 hasConcept C544956773 @default.
- W1956411094 hasConcept C57863236 @default.
- W1956411094 hasConcept C71987851 @default.
- W1956411094 hasConceptScore W1956411094C105066941 @default.
- W1956411094 hasConceptScore W1956411094C125099081 @default.
- W1956411094 hasConceptScore W1956411094C155310634 @default.
- W1956411094 hasConceptScore W1956411094C159985019 @default.
- W1956411094 hasConceptScore W1956411094C160671074 @default.
- W1956411094 hasConceptScore W1956411094C178790620 @default.
- W1956411094 hasConceptScore W1956411094C185592680 @default.
- W1956411094 hasConceptScore W1956411094C191897082 @default.
- W1956411094 hasConceptScore W1956411094C192562407 @default.
- W1956411094 hasConceptScore W1956411094C195114451 @default.
- W1956411094 hasConceptScore W1956411094C26953177 @default.
- W1956411094 hasConceptScore W1956411094C2779227376 @default.
- W1956411094 hasConceptScore W1956411094C49040817 @default.
- W1956411094 hasConceptScore W1956411094C544956773 @default.
- W1956411094 hasConceptScore W1956411094C57863236 @default.
- W1956411094 hasConceptScore W1956411094C71987851 @default.
- W1956411094 hasLocation W19564110941 @default.
- W1956411094 hasOpenAccess W1956411094 @default.
- W1956411094 hasPrimaryLocation W19564110941 @default.
- W1956411094 hasRelatedWork W1888474352 @default.
- W1956411094 hasRelatedWork W2019935547 @default.
- W1956411094 hasRelatedWork W2024074861 @default.
- W1956411094 hasRelatedWork W2035181361 @default.
- W1956411094 hasRelatedWork W2064731899 @default.
- W1956411094 hasRelatedWork W2065607124 @default.
- W1956411094 hasRelatedWork W2081064379 @default.
- W1956411094 hasRelatedWork W2130684570 @default.
- W1956411094 hasRelatedWork W2189199788 @default.
- W1956411094 hasRelatedWork W2548842644 @default.
- W1956411094 hasRelatedWork W2778864048 @default.
- W1956411094 hasRelatedWork W2902901747 @default.
- W1956411094 hasRelatedWork W3148328848 @default.
- W1956411094 hasRelatedWork W1567385970 @default.
- W1956411094 hasRelatedWork W2740546209 @default.
- W1956411094 hasRelatedWork W2818568271 @default.
- W1956411094 hasRelatedWork W2821900333 @default.
- W1956411094 hasRelatedWork W2830521165 @default.
- W1956411094 hasRelatedWork W2847444795 @default.
- W1956411094 hasRelatedWork W3151249980 @default.
- W1956411094 isParatext "false" @default.
- W1956411094 isRetracted "false" @default.
- W1956411094 magId "1956411094" @default.
- W1956411094 workType "article" @default.