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- W1957439285 abstract "This paper presents ground level feasibility study of mix-run capability on applications of metal via etches in a simulated production environment. A mini-marathon was set up to understand any particulate problems and process shift during mix-run in a MERIE plasma etch tool-a commercially available Super e chamber. Particulate, oxide and PR etch rate data will be shown to demonstrate that Super e is a production worthy etch tool for mix-run with different chemistries on metal via etch applications." @default.
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- W1957439285 date "2002-11-11" @default.
- W1957439285 modified "2023-09-27" @default.
- W1957439285 title "Pilot studies of the manufacturing worthiness of mixed chemistry processings in a MERIE plasma tool" @default.
- W1957439285 doi "https://doi.org/10.1109/asmc.2000.902627" @default.
- W1957439285 hasPublicationYear "2002" @default.
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