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- W1961366275 abstract "The application of the rapid thermal low pressure metalorganic chemical vapor deposition (RT-LPMOCVD) technique to the deposition of non-semiconductor thin-layer materials necessary for producing metal contacts to InP-based microelectronic devices is discussed. Both dielectric (SiO/sub 2/) and semimetal (TiN/sub x/) films were deposited. The two processes were realized in low pressures (5-30 torr), relatively low temperatures (350-550 degrees C), and short durations (1-200 s), exhibiting rapid growth kinetics and uniform deposited film morphology. The influence of the process parameters on the two film properties is described, and optimum deposition conditions are identified. Contacts that were prepared by RT-LPMOCVD of the TiN/sub x/ onto p-InGaAs layer using etched patterns in RT-LPCVD-SiO/sub 2/ layer are characterized as ohmic contacts.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W1961366275 created "2016-06-24" @default.
- W1961366275 creator A5068212478 @default.
- W1961366275 date "2002-12-09" @default.
- W1961366275 modified "2023-09-25" @default.
- W1961366275 title "Rapid thermal low pressure (metallorganic) chemical vapor deposition of thin films onto InP" @default.
- W1961366275 cites W1989705149 @default.
- W1961366275 cites W2012582669 @default.
- W1961366275 cites W2070928426 @default.
- W1961366275 cites W2080486149 @default.
- W1961366275 doi "https://doi.org/10.1109/iciprm.1991.147451" @default.
- W1961366275 hasPublicationYear "2002" @default.
- W1961366275 type Work @default.
- W1961366275 sameAs 1961366275 @default.
- W1961366275 citedByCount "0" @default.
- W1961366275 crossrefType "proceedings-article" @default.
- W1961366275 hasAuthorship W1961366275A5068212478 @default.
- W1961366275 hasConcept C110738630 @default.
- W1961366275 hasConcept C113196181 @default.
- W1961366275 hasConcept C121332964 @default.
- W1961366275 hasConcept C127413603 @default.
- W1961366275 hasConcept C133386390 @default.
- W1961366275 hasConcept C138230450 @default.
- W1961366275 hasConcept C151730666 @default.
- W1961366275 hasConcept C171250308 @default.
- W1961366275 hasConcept C175665537 @default.
- W1961366275 hasConcept C178790620 @default.
- W1961366275 hasConcept C183866003 @default.
- W1961366275 hasConcept C185592680 @default.
- W1961366275 hasConcept C187937830 @default.
- W1961366275 hasConcept C19067145 @default.
- W1961366275 hasConcept C191897082 @default.
- W1961366275 hasConcept C192562407 @default.
- W1961366275 hasConcept C2779227376 @default.
- W1961366275 hasConcept C2816523 @default.
- W1961366275 hasConcept C30646810 @default.
- W1961366275 hasConcept C32909587 @default.
- W1961366275 hasConcept C42360764 @default.
- W1961366275 hasConcept C49040817 @default.
- W1961366275 hasConcept C525849907 @default.
- W1961366275 hasConcept C57410435 @default.
- W1961366275 hasConcept C64297162 @default.
- W1961366275 hasConcept C75937256 @default.
- W1961366275 hasConcept C86803240 @default.
- W1961366275 hasConcept C91967747 @default.
- W1961366275 hasConcept C97355855 @default.
- W1961366275 hasConceptScore W1961366275C110738630 @default.
- W1961366275 hasConceptScore W1961366275C113196181 @default.
- W1961366275 hasConceptScore W1961366275C121332964 @default.
- W1961366275 hasConceptScore W1961366275C127413603 @default.
- W1961366275 hasConceptScore W1961366275C133386390 @default.
- W1961366275 hasConceptScore W1961366275C138230450 @default.
- W1961366275 hasConceptScore W1961366275C151730666 @default.
- W1961366275 hasConceptScore W1961366275C171250308 @default.
- W1961366275 hasConceptScore W1961366275C175665537 @default.
- W1961366275 hasConceptScore W1961366275C178790620 @default.
- W1961366275 hasConceptScore W1961366275C183866003 @default.
- W1961366275 hasConceptScore W1961366275C185592680 @default.
- W1961366275 hasConceptScore W1961366275C187937830 @default.
- W1961366275 hasConceptScore W1961366275C19067145 @default.
- W1961366275 hasConceptScore W1961366275C191897082 @default.
- W1961366275 hasConceptScore W1961366275C192562407 @default.
- W1961366275 hasConceptScore W1961366275C2779227376 @default.
- W1961366275 hasConceptScore W1961366275C2816523 @default.
- W1961366275 hasConceptScore W1961366275C30646810 @default.
- W1961366275 hasConceptScore W1961366275C32909587 @default.
- W1961366275 hasConceptScore W1961366275C42360764 @default.
- W1961366275 hasConceptScore W1961366275C49040817 @default.
- W1961366275 hasConceptScore W1961366275C525849907 @default.
- W1961366275 hasConceptScore W1961366275C57410435 @default.
- W1961366275 hasConceptScore W1961366275C64297162 @default.
- W1961366275 hasConceptScore W1961366275C75937256 @default.
- W1961366275 hasConceptScore W1961366275C86803240 @default.
- W1961366275 hasConceptScore W1961366275C91967747 @default.
- W1961366275 hasConceptScore W1961366275C97355855 @default.
- W1961366275 hasLocation W19613662751 @default.
- W1961366275 hasOpenAccess W1961366275 @default.
- W1961366275 hasPrimaryLocation W19613662751 @default.
- W1961366275 hasRelatedWork W1961366275 @default.
- W1961366275 hasRelatedWork W1967465319 @default.
- W1961366275 hasRelatedWork W1983540218 @default.
- W1961366275 hasRelatedWork W2011018343 @default.
- W1961366275 hasRelatedWork W2014234149 @default.
- W1961366275 hasRelatedWork W2048305460 @default.
- W1961366275 hasRelatedWork W2080259365 @default.
- W1961366275 hasRelatedWork W2093023881 @default.
- W1961366275 hasRelatedWork W2095155466 @default.
- W1961366275 hasRelatedWork W2320032676 @default.
- W1961366275 isParatext "false" @default.
- W1961366275 isRetracted "false" @default.
- W1961366275 magId "1961366275" @default.
- W1961366275 workType "article" @default.