Matches in SemOpenAlex for { <https://semopenalex.org/work/W1961485449> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W1961485449 abstract "In order to improve multicrystalline p-type silicon wafers, the authors have used the hydrogenation technique to deposit a Si/sub 3/N/sub 4/ layer containing hydrogen on a p-type surface. Silicon nitride films have been deposited by the process of mercury-sensitized photochemical vapor deposition (photo-CVD), using a gaseous mixture of SiH/sub 4/ and NH under 253.7 nm ultraviolet light irradiation. The main advantages of this technique are the low deposition temperature (100-400 degrees C) and no radiation damage compared to the plasma-enhanced CVD method. Due to the low temperature, the Si/sub 3/N/sub 4/ film could be deposited after the metallization of solar cells, provided that the back contact is a grid. On the front surface, the Si/sub 3/N/sub 4/ layer could constitute an antireflecting coating. A deposition rate of 8 nm/min and a refractive index of about two were achieved. >" @default.
- W1961485449 created "2016-06-24" @default.
- W1961485449 creator A5006595987 @default.
- W1961485449 creator A5054880661 @default.
- W1961485449 creator A5060334650 @default.
- W1961485449 date "2002-12-09" @default.
- W1961485449 modified "2023-09-26" @default.
- W1961485449 title "Hydrogenation of multicrystalline silicon from a backside silicon nitride layer" @default.
- W1961485449 cites W2005745886 @default.
- W1961485449 cites W2021311361 @default.
- W1961485449 cites W2023321056 @default.
- W1961485449 cites W2048733806 @default.
- W1961485449 cites W2052548882 @default.
- W1961485449 cites W2059401070 @default.
- W1961485449 doi "https://doi.org/10.1109/pvsc.1991.169360" @default.
- W1961485449 hasPublicationYear "2002" @default.
- W1961485449 type Work @default.
- W1961485449 sameAs 1961485449 @default.
- W1961485449 citedByCount "6" @default.
- W1961485449 crossrefType "proceedings-article" @default.
- W1961485449 hasAuthorship W1961485449A5006595987 @default.
- W1961485449 hasAuthorship W1961485449A5054880661 @default.
- W1961485449 hasAuthorship W1961485449A5060334650 @default.
- W1961485449 hasConcept C113196181 @default.
- W1961485449 hasConcept C151730666 @default.
- W1961485449 hasConcept C160671074 @default.
- W1961485449 hasConcept C171250308 @default.
- W1961485449 hasConcept C178790620 @default.
- W1961485449 hasConcept C185592680 @default.
- W1961485449 hasConcept C192562407 @default.
- W1961485449 hasConcept C194760766 @default.
- W1961485449 hasConcept C2777431650 @default.
- W1961485449 hasConcept C2779227376 @default.
- W1961485449 hasConcept C2816523 @default.
- W1961485449 hasConcept C43617362 @default.
- W1961485449 hasConcept C49040817 @default.
- W1961485449 hasConcept C512968161 @default.
- W1961485449 hasConcept C544956773 @default.
- W1961485449 hasConcept C57410435 @default.
- W1961485449 hasConcept C64297162 @default.
- W1961485449 hasConcept C86803240 @default.
- W1961485449 hasConceptScore W1961485449C113196181 @default.
- W1961485449 hasConceptScore W1961485449C151730666 @default.
- W1961485449 hasConceptScore W1961485449C160671074 @default.
- W1961485449 hasConceptScore W1961485449C171250308 @default.
- W1961485449 hasConceptScore W1961485449C178790620 @default.
- W1961485449 hasConceptScore W1961485449C185592680 @default.
- W1961485449 hasConceptScore W1961485449C192562407 @default.
- W1961485449 hasConceptScore W1961485449C194760766 @default.
- W1961485449 hasConceptScore W1961485449C2777431650 @default.
- W1961485449 hasConceptScore W1961485449C2779227376 @default.
- W1961485449 hasConceptScore W1961485449C2816523 @default.
- W1961485449 hasConceptScore W1961485449C43617362 @default.
- W1961485449 hasConceptScore W1961485449C49040817 @default.
- W1961485449 hasConceptScore W1961485449C512968161 @default.
- W1961485449 hasConceptScore W1961485449C544956773 @default.
- W1961485449 hasConceptScore W1961485449C57410435 @default.
- W1961485449 hasConceptScore W1961485449C64297162 @default.
- W1961485449 hasConceptScore W1961485449C86803240 @default.
- W1961485449 hasLocation W19614854491 @default.
- W1961485449 hasOpenAccess W1961485449 @default.
- W1961485449 hasPrimaryLocation W19614854491 @default.
- W1961485449 hasRelatedWork W1579969514 @default.
- W1961485449 hasRelatedWork W1586252654 @default.
- W1961485449 hasRelatedWork W1966386151 @default.
- W1961485449 hasRelatedWork W1971429186 @default.
- W1961485449 hasRelatedWork W1972496887 @default.
- W1961485449 hasRelatedWork W1983463261 @default.
- W1961485449 hasRelatedWork W1997358054 @default.
- W1961485449 hasRelatedWork W2009024254 @default.
- W1961485449 hasRelatedWork W2018176251 @default.
- W1961485449 hasRelatedWork W2027822926 @default.
- W1961485449 hasRelatedWork W2043460771 @default.
- W1961485449 hasRelatedWork W2077864385 @default.
- W1961485449 hasRelatedWork W2078119145 @default.
- W1961485449 hasRelatedWork W2092365420 @default.
- W1961485449 hasRelatedWork W2098744048 @default.
- W1961485449 hasRelatedWork W2138633369 @default.
- W1961485449 hasRelatedWork W2149134195 @default.
- W1961485449 hasRelatedWork W2149188619 @default.
- W1961485449 hasRelatedWork W2321513214 @default.
- W1961485449 hasRelatedWork W2588476322 @default.
- W1961485449 isParatext "false" @default.
- W1961485449 isRetracted "false" @default.
- W1961485449 magId "1961485449" @default.
- W1961485449 workType "article" @default.