Matches in SemOpenAlex for { <https://semopenalex.org/work/W1963483560> ?p ?o ?g. }
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- W1963483560 endingPage "105" @default.
- W1963483560 startingPage "99" @default.
- W1963483560 abstract "In this paper, we propose a new selective two-step method of anodization of porous anodic alumina (PAA) for thin-film encapsulation. It is based on the formation of a selectively anodized porous alumina membrane using only photoresist (PR) which offers lots of vertical nanopores as release holes for sacrificial layer etching. This method allows finer patterning in the selective PAA process and reduces the whole process time and cost. Furthermore, it does not leave isolated aluminum (Al) residue during the anodization process, and the deposited Al film is not conformal over the 3-dimensional structure. The key for this new selective anodization method is the technique to form the locally anodized PAA membrane with the masking material PR by two-step anodization. The nanopores in the PAA membrane allow the penetration of plasma gas or etchant into the cavity to release the sacrificial layer underneath. To seal the packaging, a thin-film is deposited over the selectively anodized PAA membrane in a vacuum ambient atmosphere with no detectable internal deposition of the sealing material. Hermetically sealed thin-film vacuum encapsulation using the proposed selective anodization method is demonstrated, and its hermeticity is also monitored through the measurement of the center deflection of the sealing layer." @default.
- W1963483560 created "2016-06-24" @default.
- W1963483560 creator A5010786841 @default.
- W1963483560 creator A5072865889 @default.
- W1963483560 creator A5072991739 @default.
- W1963483560 date "2013-03-01" @default.
- W1963483560 modified "2023-09-27" @default.
- W1963483560 title "New selective two-step anodization of porous anodic alumina for thin-film encapsulation" @default.
- W1963483560 cites W1963563845 @default.
- W1963483560 cites W1965384415 @default.
- W1963483560 cites W1967461038 @default.
- W1963483560 cites W1967749987 @default.
- W1963483560 cites W1983953201 @default.
- W1963483560 cites W1984066646 @default.
- W1963483560 cites W1998903138 @default.
- W1963483560 cites W2001140350 @default.
- W1963483560 cites W2003916412 @default.
- W1963483560 cites W2016902821 @default.
- W1963483560 cites W2022764576 @default.
- W1963483560 cites W2024670207 @default.
- W1963483560 cites W2028700429 @default.
- W1963483560 cites W2057579209 @default.
- W1963483560 cites W2090057469 @default.
- W1963483560 cites W2094990092 @default.
- W1963483560 cites W2108985411 @default.
- W1963483560 cites W2141465653 @default.
- W1963483560 cites W2145894257 @default.
- W1963483560 cites W2155721926 @default.
- W1963483560 cites W2157254946 @default.
- W1963483560 doi "https://doi.org/10.1016/j.mee.2012.09.018" @default.
- W1963483560 hasPublicationYear "2013" @default.
- W1963483560 type Work @default.
- W1963483560 sameAs 1963483560 @default.
- W1963483560 citedByCount "6" @default.
- W1963483560 countsByYear W19634835602012 @default.
- W1963483560 countsByYear W19634835602013 @default.
- W1963483560 countsByYear W19634835602015 @default.
- W1963483560 countsByYear W19634835602016 @default.
- W1963483560 countsByYear W19634835602019 @default.
- W1963483560 countsByYear W19634835602020 @default.
- W1963483560 crossrefType "journal-article" @default.
- W1963483560 hasAuthorship W1963483560A5010786841 @default.
- W1963483560 hasAuthorship W1963483560A5072865889 @default.
- W1963483560 hasAuthorship W1963483560A5072991739 @default.
- W1963483560 hasConcept C127413603 @default.
- W1963483560 hasConcept C141795571 @default.
- W1963483560 hasConcept C159985019 @default.
- W1963483560 hasConcept C171250308 @default.
- W1963483560 hasConcept C185592680 @default.
- W1963483560 hasConcept C19067145 @default.
- W1963483560 hasConcept C192562407 @default.
- W1963483560 hasConcept C22016385 @default.
- W1963483560 hasConcept C41625074 @default.
- W1963483560 hasConcept C42360764 @default.
- W1963483560 hasConcept C513153333 @default.
- W1963483560 hasConcept C55493867 @default.
- W1963483560 hasConcept C6648577 @default.
- W1963483560 hasConceptScore W1963483560C127413603 @default.
- W1963483560 hasConceptScore W1963483560C141795571 @default.
- W1963483560 hasConceptScore W1963483560C159985019 @default.
- W1963483560 hasConceptScore W1963483560C171250308 @default.
- W1963483560 hasConceptScore W1963483560C185592680 @default.
- W1963483560 hasConceptScore W1963483560C19067145 @default.
- W1963483560 hasConceptScore W1963483560C192562407 @default.
- W1963483560 hasConceptScore W1963483560C22016385 @default.
- W1963483560 hasConceptScore W1963483560C41625074 @default.
- W1963483560 hasConceptScore W1963483560C42360764 @default.
- W1963483560 hasConceptScore W1963483560C513153333 @default.
- W1963483560 hasConceptScore W1963483560C55493867 @default.
- W1963483560 hasConceptScore W1963483560C6648577 @default.
- W1963483560 hasLocation W19634835601 @default.
- W1963483560 hasOpenAccess W1963483560 @default.
- W1963483560 hasPrimaryLocation W19634835601 @default.
- W1963483560 hasRelatedWork W1980230900 @default.
- W1963483560 hasRelatedWork W2022309615 @default.
- W1963483560 hasRelatedWork W2028049345 @default.
- W1963483560 hasRelatedWork W2049213869 @default.
- W1963483560 hasRelatedWork W2056238685 @default.
- W1963483560 hasRelatedWork W2075580692 @default.
- W1963483560 hasRelatedWork W2093275523 @default.
- W1963483560 hasRelatedWork W2361180743 @default.
- W1963483560 hasRelatedWork W2384279159 @default.
- W1963483560 hasRelatedWork W2617238589 @default.
- W1963483560 hasVolume "103" @default.
- W1963483560 isParatext "false" @default.
- W1963483560 isRetracted "false" @default.
- W1963483560 magId "1963483560" @default.
- W1963483560 workType "article" @default.