FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1963526912> ?p ?o ?g. }

• W1963526912 endingPage "442" @default.
• W1963526912 startingPage "432" @default.
• W1963526912 abstract "Finely focused ion beams with current densities on the order of one A/cm2 with beam diameters as small as 0.1 μm are used in a wide variety of surface processing applications in microelectronic research. Some of the techniques include scanning ion microscopy and high spatial resolution SIMS, micromachining by physical sputtering, ion beam induced surface chemistry for etching and deposition, maskless implantations, and lithography. The primary commercial application to date has been defect repair for photomasks although integrated circuit modification for diagnostic purposes is emerging as important. Focused ion beams have also been applied to III–V materials for in situ processing, lithography, and fabrication of integrated optics devices by micromachining. Several focused ion beam techniques and applications will be reviewed. Particular emphasis will be placed on micromachining, deposition, and SIMS techniques." @default.
• W1963526912 created "2016-06-24" @default.
• W1963526912 creator A5067154914 @default.
• W1963526912 date "1989-01-01" @default.
• W1963526912 modified "2023-10-16" @default.
• W1963526912 title "Microfocused ion beam applications in microelectronics" @default.
• W1963526912 cites W1974937922 @default.
• W1963526912 cites W1976288220 @default.
• W1963526912 cites W1990475342 @default.
• W1963526912 cites W1993064800 @default.
• W1963526912 cites W2018279773 @default.
• W1963526912 cites W2019708504 @default.
• W1963526912 cites W2025720102 @default.
• W1963526912 cites W2028441260 @default.
• W1963526912 cites W2029220028 @default.
• W1963526912 cites W2035757541 @default.
• W1963526912 cites W2040233659 @default.
• W1963526912 cites W2048650994 @default.
• W1963526912 cites W2052215333 @default.
• W1963526912 cites W2056298082 @default.
• W1963526912 cites W2060109915 @default.
• W1963526912 cites W2067370603 @default.
• W1963526912 cites W2074428935 @default.
• W1963526912 cites W2081476090 @default.
• W1963526912 cites W2083648065 @default.
• W1963526912 cites W2089838331 @default.
• W1963526912 cites W2090357094 @default.
• W1963526912 cites W2132985166 @default.
• W1963526912 cites W2162230298 @default.
• W1963526912 doi "https://doi.org/10.1016/0169-4332(89)90939-2" @default.
• W1963526912 hasPublicationYear "1989" @default.
• W1963526912 type Work @default.
• W1963526912 sameAs 1963526912 @default.
• W1963526912 citedByCount "24" @default.
• W1963526912 countsByYear W19635269122017 @default.
• W1963526912 crossrefType "journal-article" @default.
• W1963526912 hasAuthorship W1963526912A5067154914 @default.
• W1963526912 hasConcept C100460472 @default.
• W1963526912 hasConcept C105487726 @default.
• W1963526912 hasConcept C120665830 @default.
• W1963526912 hasConcept C121332964 @default.
• W1963526912 hasConcept C136525101 @default.
• W1963526912 hasConcept C142724271 @default.
• W1963526912 hasConcept C145148216 @default.
• W1963526912 hasConcept C145667562 @default.
• W1963526912 hasConcept C161866238 @default.
• W1963526912 hasConcept C168834538 @default.
• W1963526912 hasConcept C171250308 @default.
• W1963526912 hasConcept C178790620 @default.
• W1963526912 hasConcept C185592680 @default.
• W1963526912 hasConcept C187937830 @default.
• W1963526912 hasConcept C19067145 @default.
• W1963526912 hasConcept C192562407 @default.
• W1963526912 hasConcept C204223013 @default.
• W1963526912 hasConcept C204787440 @default.
• W1963526912 hasConcept C22423302 @default.
• W1963526912 hasConcept C2779227376 @default.
• W1963526912 hasConcept C2781048479 @default.
• W1963526912 hasConcept C48736558 @default.
• W1963526912 hasConcept C49040817 @default.
• W1963526912 hasConcept C50774322 @default.
• W1963526912 hasConcept C53524968 @default.
• W1963526912 hasConcept C71924100 @default.
• W1963526912 hasConceptScore W1963526912C100460472 @default.
• W1963526912 hasConceptScore W1963526912C105487726 @default.
• W1963526912 hasConceptScore W1963526912C120665830 @default.
• W1963526912 hasConceptScore W1963526912C121332964 @default.
• W1963526912 hasConceptScore W1963526912C136525101 @default.
• W1963526912 hasConceptScore W1963526912C142724271 @default.
• W1963526912 hasConceptScore W1963526912C145148216 @default.
• W1963526912 hasConceptScore W1963526912C145667562 @default.
• W1963526912 hasConceptScore W1963526912C161866238 @default.
• W1963526912 hasConceptScore W1963526912C168834538 @default.
• W1963526912 hasConceptScore W1963526912C171250308 @default.
• W1963526912 hasConceptScore W1963526912C178790620 @default.
• W1963526912 hasConceptScore W1963526912C185592680 @default.
• W1963526912 hasConceptScore W1963526912C187937830 @default.
• W1963526912 hasConceptScore W1963526912C19067145 @default.
• W1963526912 hasConceptScore W1963526912C192562407 @default.
• W1963526912 hasConceptScore W1963526912C204223013 @default.
• W1963526912 hasConceptScore W1963526912C204787440 @default.
• W1963526912 hasConceptScore W1963526912C22423302 @default.
• W1963526912 hasConceptScore W1963526912C2779227376 @default.
• W1963526912 hasConceptScore W1963526912C2781048479 @default.
• W1963526912 hasConceptScore W1963526912C48736558 @default.
• W1963526912 hasConceptScore W1963526912C49040817 @default.
• W1963526912 hasConceptScore W1963526912C50774322 @default.
• W1963526912 hasConceptScore W1963526912C53524968 @default.
• W1963526912 hasConceptScore W1963526912C71924100 @default.
• W1963526912 hasIssue "1-4" @default.
• W1963526912 hasLocation W19635269121 @default.
• W1963526912 hasOpenAccess W1963526912 @default.
• W1963526912 hasPrimaryLocation W19635269121 @default.
• W1963526912 hasRelatedWork W1963526912 @default.
• W1963526912 hasRelatedWork W1980936528 @default.
• W1963526912 hasRelatedWork W1982717151 @default.
• W1963526912 hasRelatedWork W2021685851 @default.
• W1963526912 hasRelatedWork W2024333637 @default.

• next