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• W1963551034 abstract "This letter reports on fabrication of a low-cost high-dynamic range near infrared (NIR) photodiode detector on glass substrate using thin films of hydrogenated nanocrystalline silicon (nc-Si:H) prepared by 13.56-MHz plasma-enhanced chemical vapor deposition. The fabricated device shows more than two orders of magnitude enhancement in external quantum efficiency compared with the conventional hydrogenated amorphous silicon (a-Si:H) photodiode in the wavelength region of 830-950 nm. The short circuit dark current density of the nc-Si:H device is 22.3 nA/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> , which is only four times higher than that of a-Si:H photodiode. As a result, the dynamic range of operation for nc-Si:H device is at least 35 times higher than its amorphous counterpart in the wavelength region of interest, making it suitable for digital NIR imaging applications." @default.
• W1963551034 created "2016-06-24" @default.
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• W1963551034 date "2014-11-01" @default.
• W1963551034 modified "2023-10-18" @default.
• W1963551034 title "Hydrogenated Nanocrystalline Silicon Near Infrared Photodiode Detector" @default.
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• W1963551034 doi "https://doi.org/10.1109/led.2014.2358559" @default.
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