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- W1963558302 abstract "Both of DUV/VUV and femtosecond lasers are expected as novel tools for materials processing for the next generation. DUV/VUV laser is good at surface micropatterning and surface shaping, while femtosecond laser is suitable for internal modification of transparent materials as well as micro-hole drilling, cutting and high aspect ratio machining. In this paper, precison microfabrication of dielectrics and semiconductors using DUV/VUV and femtosecond lasers are reviewed, and features of each laser processing are compared." @default.
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- W1963558302 date "2002-01-01" @default.
- W1963558302 modified "2023-09-25" @default.
- W1963558302 title "Comparison between DUV/VUV and Femtosecond Laser Processing of Dielectrics and Semiconductors." @default.
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- W1963558302 doi "https://doi.org/10.2184/lsj.30.226" @default.
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