FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1963624257> ?p ?o ?g. }

• W1963624257 endingPage "407" @default.
• W1963624257 startingPage "400" @default.
• W1963624257 abstract "This paper reports the implementation and wafer-level mechanical and RF testing of three types of MEMS inductor-octagonal, square, and circular; the latter over a temperature range -30 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>°</sup> C to 150 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>°</sup> C. The devices were fabricated using a silicon on insulator process with deep reactive ion etching (DRIE) trench on a low-resistivity substrate (ρ = 1-10 Ω cm) and contains gold bond wire overpass to complete the inductance loop. The three inductors exhibited nominal inductance of 3.36, 12.15, and 3.29 nH with peak quality factor of 9.51, 6.91, and 7.26, respectively, and self-resonance frequency more than 10 GHz. Afterward, the inductors were packaged in a pin grid array package and postpackaging RF testing was carried out to analyze the effect of packaging on RF performance of the inductors." @default.
• W1963624257 created "2016-06-24" @default.
• W1963624257 creator A5022460657 @default.
• W1963624257 creator A5067434797 @default.
• W1963624257 date "2014-02-01" @default.
• W1963624257 modified "2023-09-23" @default.
• W1963624257 title "Effect of Temperature Variation and Packaging on SOI MEMS Inductor With DRIE Trench on Low-Resistivity Substrate" @default.
• W1963624257 cites W1514027718 @default.
• W1963624257 cites W1629352068 @default.
• W1963624257 cites W1899063697 @default.
• W1963624257 cites W1913158603 @default.
• W1963624257 cites W1963810142 @default.
• W1963624257 cites W1975588356 @default.
• W1963624257 cites W1986941231 @default.
• W1963624257 cites W2009789925 @default.
• W1963624257 cites W2016962679 @default.
• W1963624257 cites W2018008910 @default.
• W1963624257 cites W2020727027 @default.
• W1963624257 cites W2088883568 @default.
• W1963624257 cites W2108947676 @default.
• W1963624257 cites W2136224413 @default.
• W1963624257 cites W2137486779 @default.
• W1963624257 cites W2141507175 @default.
• W1963624257 cites W2150586834 @default.
• W1963624257 cites W2159696097 @default.
• W1963624257 cites W2167004581 @default.
• W1963624257 cites W2168584801 @default.
• W1963624257 cites W2226201815 @default.
• W1963624257 cites W2098714002 @default.
• W1963624257 doi "https://doi.org/10.1109/ted.2013.2295535" @default.
• W1963624257 hasPublicationYear "2014" @default.
• W1963624257 type Work @default.
• W1963624257 sameAs 1963624257 @default.
• W1963624257 citedByCount "5" @default.
• W1963624257 countsByYear W19636242572015 @default.
• W1963624257 countsByYear W19636242572017 @default.
• W1963624257 countsByYear W19636242572020 @default.
• W1963624257 crossrefType "journal-article" @default.
• W1963624257 hasAuthorship W1963624257A5022460657 @default.
• W1963624257 hasAuthorship W1963624257A5067434797 @default.
• W1963624257 hasConcept C100460472 @default.
• W1963624257 hasConcept C111368507 @default.
• W1963624257 hasConcept C119599485 @default.
• W1963624257 hasConcept C124634506 @default.
• W1963624257 hasConcept C127313418 @default.
• W1963624257 hasConcept C127413603 @default.
• W1963624257 hasConcept C130472188 @default.
• W1963624257 hasConcept C144534570 @default.
• W1963624257 hasConcept C159985019 @default.
• W1963624257 hasConcept C160671074 @default.
• W1963624257 hasConcept C165801399 @default.
• W1963624257 hasConcept C187725362 @default.
• W1963624257 hasConcept C192562407 @default.
• W1963624257 hasConcept C2777289219 @default.
• W1963624257 hasConcept C2779227376 @default.
• W1963624257 hasConcept C29210110 @default.
• W1963624257 hasConcept C37977207 @default.
• W1963624257 hasConcept C49040817 @default.
• W1963624257 hasConcept C53143962 @default.
• W1963624257 hasConcept C544956773 @default.
• W1963624257 hasConcept C97126364 @default.
• W1963624257 hasConceptScore W1963624257C100460472 @default.
• W1963624257 hasConceptScore W1963624257C111368507 @default.
• W1963624257 hasConceptScore W1963624257C119599485 @default.
• W1963624257 hasConceptScore W1963624257C124634506 @default.
• W1963624257 hasConceptScore W1963624257C127313418 @default.
• W1963624257 hasConceptScore W1963624257C127413603 @default.
• W1963624257 hasConceptScore W1963624257C130472188 @default.
• W1963624257 hasConceptScore W1963624257C144534570 @default.
• W1963624257 hasConceptScore W1963624257C159985019 @default.
• W1963624257 hasConceptScore W1963624257C160671074 @default.
• W1963624257 hasConceptScore W1963624257C165801399 @default.
• W1963624257 hasConceptScore W1963624257C187725362 @default.
• W1963624257 hasConceptScore W1963624257C192562407 @default.
• W1963624257 hasConceptScore W1963624257C2777289219 @default.
• W1963624257 hasConceptScore W1963624257C2779227376 @default.
• W1963624257 hasConceptScore W1963624257C29210110 @default.
• W1963624257 hasConceptScore W1963624257C37977207 @default.
• W1963624257 hasConceptScore W1963624257C49040817 @default.
• W1963624257 hasConceptScore W1963624257C53143962 @default.
• W1963624257 hasConceptScore W1963624257C544956773 @default.
• W1963624257 hasConceptScore W1963624257C97126364 @default.
• W1963624257 hasIssue "2" @default.
• W1963624257 hasLocation W19636242571 @default.
• W1963624257 hasOpenAccess W1963624257 @default.
• W1963624257 hasPrimaryLocation W19636242571 @default.
• W1963624257 hasRelatedWork W1972036137 @default.
• W1963624257 hasRelatedWork W1981732811 @default.
• W1963624257 hasRelatedWork W2040369001 @default.
• W1963624257 hasRelatedWork W2046674243 @default.
• W1963624257 hasRelatedWork W2055382124 @default.
• W1963624257 hasRelatedWork W2058254754 @default.
• W1963624257 hasRelatedWork W2059546765 @default.
• W1963624257 hasRelatedWork W2090074512 @default.
• W1963624257 hasRelatedWork W2104614156 @default.
• W1963624257 hasRelatedWork W2106719148 @default.
• W1963624257 hasRelatedWork W2112897460 @default.
• W1963624257 hasRelatedWork W2123311345 @default.

• next