FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1963678911> ?p ?o ?g. }

• W1963678911 endingPage "1050" @default.
• W1963678911 startingPage "1048" @default.
• W1963678911 abstract "The effect of hydrogen dilution on deposition of a-SiC:H from silane/ethylene mixtures has been investigated by analyzing deposited films using optical absorption and x-ray photoelectron spectroscopy (XPS) measurements. Film deposition rate and stoichiometry are found to be sensitive to the hydrogen dilution rate and it is proposed that ethylene decomposes through a two stage reaction with atomic hydrogen. Films with similar stoichiometries deposited using different combinations of ethylene, silane, and hydrogen and are found to have the steepest optical absorption edge when the ethylene/silane ratio is low and when the hydrogen partial pressure fraction is at 80%–85% of the total pressure. XPS measurements show that the density of SiC bonds increases as the slope of the optical edge becomes steeper." @default.
• W1963678911 created "2016-06-24" @default.
• W1963678911 creator A5014041012 @default.
• W1963678911 creator A5038252918 @default.
• W1963678911 creator A5074404539 @default.
• W1963678911 date "1990-01-15" @default.
• W1963678911 modified "2023-09-26" @default.
• W1963678911 title "The role of hydrogen dilution in deposition of<i>a</i>‐SiC:H from silane/ethylene mixtures" @default.
• W1963678911 cites W1966453601 @default.
• W1963678911 cites W1971422279 @default.
• W1963678911 cites W1976325591 @default.
• W1963678911 cites W1988592900 @default.
• W1963678911 cites W1992528481 @default.
• W1963678911 cites W2013996497 @default.
• W1963678911 cites W2014268181 @default.
• W1963678911 cites W2032389259 @default.
• W1963678911 cites W2045884085 @default.
• W1963678911 cites W2046261832 @default.
• W1963678911 cites W2058838430 @default.
• W1963678911 cites W2065440379 @default.
• W1963678911 cites W2073190518 @default.
• W1963678911 cites W2141399311 @default.
• W1963678911 cites W2483805890 @default.
• W1963678911 doi "https://doi.org/10.1063/1.345789" @default.
• W1963678911 hasPublicationYear "1990" @default.
• W1963678911 type Work @default.
• W1963678911 sameAs 1963678911 @default.
• W1963678911 citedByCount "5" @default.
• W1963678911 crossrefType "journal-article" @default.
• W1963678911 hasAuthorship W1963678911A5014041012 @default.
• W1963678911 hasAuthorship W1963678911A5038252918 @default.
• W1963678911 hasAuthorship W1963678911A5074404539 @default.
• W1963678911 hasConcept C113196181 @default.
• W1963678911 hasConcept C121332964 @default.
• W1963678911 hasConcept C125287762 @default.
• W1963678911 hasConcept C127413603 @default.
• W1963678911 hasConcept C144082473 @default.
• W1963678911 hasConcept C147789679 @default.
• W1963678911 hasConcept C151730666 @default.
• W1963678911 hasConcept C159985019 @default.
• W1963678911 hasConcept C161790260 @default.
• W1963678911 hasConcept C175708663 @default.
• W1963678911 hasConcept C178790620 @default.
• W1963678911 hasConcept C179104552 @default.
• W1963678911 hasConcept C181966813 @default.
• W1963678911 hasConcept C185592680 @default.
• W1963678911 hasConcept C192562407 @default.
• W1963678911 hasConcept C2778024649 @default.
• W1963678911 hasConcept C2778597550 @default.
• W1963678911 hasConcept C2816523 @default.
• W1963678911 hasConcept C42360764 @default.
• W1963678911 hasConcept C49040817 @default.
• W1963678911 hasConcept C50792271 @default.
• W1963678911 hasConcept C512968161 @default.
• W1963678911 hasConcept C540031477 @default.
• W1963678911 hasConcept C64297162 @default.
• W1963678911 hasConcept C68463220 @default.
• W1963678911 hasConcept C86803240 @default.
• W1963678911 hasConcept C96618451 @default.
• W1963678911 hasConcept C97355855 @default.
• W1963678911 hasConceptScore W1963678911C113196181 @default.
• W1963678911 hasConceptScore W1963678911C121332964 @default.
• W1963678911 hasConceptScore W1963678911C125287762 @default.
• W1963678911 hasConceptScore W1963678911C127413603 @default.
• W1963678911 hasConceptScore W1963678911C144082473 @default.
• W1963678911 hasConceptScore W1963678911C147789679 @default.
• W1963678911 hasConceptScore W1963678911C151730666 @default.
• W1963678911 hasConceptScore W1963678911C159985019 @default.
• W1963678911 hasConceptScore W1963678911C161790260 @default.
• W1963678911 hasConceptScore W1963678911C175708663 @default.
• W1963678911 hasConceptScore W1963678911C178790620 @default.
• W1963678911 hasConceptScore W1963678911C179104552 @default.
• W1963678911 hasConceptScore W1963678911C181966813 @default.
• W1963678911 hasConceptScore W1963678911C185592680 @default.
• W1963678911 hasConceptScore W1963678911C192562407 @default.
• W1963678911 hasConceptScore W1963678911C2778024649 @default.
• W1963678911 hasConceptScore W1963678911C2778597550 @default.
• W1963678911 hasConceptScore W1963678911C2816523 @default.
• W1963678911 hasConceptScore W1963678911C42360764 @default.
• W1963678911 hasConceptScore W1963678911C49040817 @default.
• W1963678911 hasConceptScore W1963678911C50792271 @default.
• W1963678911 hasConceptScore W1963678911C512968161 @default.
• W1963678911 hasConceptScore W1963678911C540031477 @default.
• W1963678911 hasConceptScore W1963678911C64297162 @default.
• W1963678911 hasConceptScore W1963678911C68463220 @default.
• W1963678911 hasConceptScore W1963678911C86803240 @default.
• W1963678911 hasConceptScore W1963678911C96618451 @default.
• W1963678911 hasConceptScore W1963678911C97355855 @default.
• W1963678911 hasIssue "2" @default.
• W1963678911 hasLocation W19636789111 @default.
• W1963678911 hasOpenAccess W1963678911 @default.
• W1963678911 hasPrimaryLocation W19636789111 @default.
• W1963678911 hasRelatedWork W114110515 @default.
• W1963678911 hasRelatedWork W1963678911 @default.
• W1963678911 hasRelatedWork W1983399071 @default.
• W1963678911 hasRelatedWork W1985064754 @default.
• W1963678911 hasRelatedWork W2013060339 @default.
• W1963678911 hasRelatedWork W2039688373 @default.

• next