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• W1963756935 abstract "Nanodiamond film surfaces were structured into high-aspect-ratio nanodiamond cones and whiskers by utilizing bias-assisted reactive ion etching (RIE) in hydrogen/argon microwave plasmas. The role of Ar addition in the RIE process was investigated by varying the argon concentration in a wide range from 5 to 75% in the plasma. Based on the dependence of the density and the geometrical configuration of cones/whiskers on RIE conditions, the formation mechanism of these nanodiamond structures was discussed. It was found that the formation of the conical/whisker structures was correlated with the original column structure of nanodiamond films. The bias-assisted RIE structuring involves both physical and chemical etching, and the addition of Ar in the plasma is capable of enhancing the physical etching significantly." @default.
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• W1963756935 date "2007-04-01" @default.
• W1963756935 modified "2023-09-22" @default.
• W1963756935 title "Fabrication of diamond nanocones and nanowhiskers by bias-assisted plasma etching" @default.
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• W1963756935 doi "https://doi.org/10.1016/j.diamond.2006.11.036" @default.
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