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- W1963788445 abstract "ZrO2 layers stabilized with 9 mol% Y2O3 of 35–100 nm thickness were deposited by sputtering on 200 nm thick Fe layers on SiO2/Si. The samples were bombarded with 300 keV Kr ions at RT with doses ranging from 5×1015 to 8×1016 Kr/cm2. They were analyzed by means of RBS, GXRD, TEM and SEM techniques. RBS analysis revealed important atomic transport across the ZrO2/Fe interface. The amount of intermixed atoms increases with increasing ion dose. As-deposited ZrO2(Y2O3) layers have the tetragonal structure that was transformed upon Kr-ion bombardment into the cubic one. Kr blistering was observed for samples implanted with 300 keV Kr ions to doses exceeding 5×1016 at./cm2. The atomic transport of Zr and Fe across the ZrO2/Fe interface was apparently governed by ballistic ion-beam mixing. The long range migration of O atoms was also observed and is attributed to Fe oxidation." @default.
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- W1963788445 date "2000-05-01" @default.
- W1963788445 modified "2023-09-28" @default.
- W1963788445 title "Atomic transport effects in Kr-ion bombarded ZrO2/Fe ternary system" @default.
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- W1963788445 doi "https://doi.org/10.1016/s0168-583x(99)00646-1" @default.
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