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• W1963886372 abstract "Abstract Understanding the gas‐phase and surface chemistry of NH x species in pulsed NH 3 plasmas can lead to optimized plasma conditions for nitriding metal oxide surfaces such as TiO 2 . Gas‐phase densities and surface reactions of NH and NH 2 in pulsed NH 3 plasmas used to nitride TiO 2 surfaces were explored by systematically varying peak plasma power and pulsing duty cycle. Results from laser induced fluorescence and optical emission spectroscopy studies reveal interconnected trends of gas‐phase densities and surface reactions. Divergent trends in NH, NH 2 H α , H γ , N , and N densities found in short pulse plasmas are explained by plasma pulse initiation and afterglow effects. NH 2 and NH surface scatter coefficients were measured with the imaging of radicals interacting with surfaces technique as a function of plasma parameters, including pulse sequence. Results show NH x species primarily scatter off of TiO 2 and are correlated to NH gas phase densities. magnified image" @default.
• W1963886372 created "2016-06-24" @default.
• W1963886372 creator A5024609348 @default.
• W1963886372 creator A5090952041 @default.
• W1963886372 date "2012-07-30" @default.
• W1963886372 modified "2023-10-10" @default.
• W1963886372 title "NH₂ and NH Surface Production in Pulsed NH₃ Plasmas on TiO₂ : A Steady-State Probe of Short Pulse Plasmas" @default.
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• W1963886372 doi "https://doi.org/10.1002/ppap.201200060" @default.
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