FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1963897385> ?p ?o ?g. }

• W1963897385 endingPage "565" @default.
• W1963897385 startingPage "561" @default.
• W1963897385 abstract "Heavily phosphorus doped samples of both Si(100) and polycrystalline silicon (poly-Si) together with nondoped poly-Si were examined using X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectroscopy (SIMS). The surfaces were treated by HF or a mixed solution of HCl, H2O2 and H2O. The Si2p photoelectron spectra from the heavily P-doped samples showed a new peak at below 0.4 eV from the Si0 state, which suggests that the Si-P bond and/or activated Si atoms with dangling bond exist in the surface region of as large as several nanometers. This is further supported by the analysis of P2p spectra. A lots of P atoms diffused to the surface and broke the Si-Si bond, which caused the surfaces chemically unstable. Consequently, although the H-terminated nondoped poly-Si surface showed no oxide features, the heavily P-doped samples of both Si(100) and poly-Si exhibited 0.5–1 nm thick oxides. The sputter profiles of XPS and SIMS revealed that P atoms redistributed in the thin native oxide film and formed not P2O5 but Si-P and/or elemental-P, even without intentional heating. The P-segregation was much more pronounced for the single crystal Si than for the poly-Si." @default.
• W1963897385 created "2016-06-24" @default.
• W1963897385 creator A5001308836 @default.
• W1963897385 creator A5006313340 @default.
• W1963897385 creator A5016011913 @default.
• W1963897385 creator A5020527095 @default.
• W1963897385 creator A5030168190 @default.
• W1963897385 creator A5055815607 @default.
• W1963897385 date "1996-07-01" @default.
• W1963897385 modified "2023-09-27" @default.
• W1963897385 title "Phosphorus redistribution in the surface region of heavily phosphorus doped silicon" @default.
• W1963897385 cites W1977419538 @default.
• W1963897385 cites W1978242815 @default.
• W1963897385 cites W1991401244 @default.
• W1963897385 cites W2004911401 @default.
• W1963897385 cites W2039774876 @default.
• W1963897385 cites W2043638491 @default.
• W1963897385 cites W2052655424 @default.
• W1963897385 cites W2095260816 @default.
• W1963897385 cites W2273886880 @default.
• W1963897385 cites W2315459559 @default.
• W1963897385 cites W2321078717 @default.
• W1963897385 cites W2334360154 @default.
• W1963897385 doi "https://doi.org/10.1016/0169-4332(96)00339-x" @default.
• W1963897385 hasPublicationYear "1996" @default.
• W1963897385 type Work @default.
• W1963897385 sameAs 1963897385 @default.
• W1963897385 citedByCount "11" @default.
• W1963897385 countsByYear W19638973852018 @default.
• W1963897385 countsByYear W19638973852020 @default.
• W1963897385 countsByYear W19638973852023 @default.
• W1963897385 crossrefType "journal-article" @default.
• W1963897385 hasAuthorship W1963897385A5001308836 @default.
• W1963897385 hasAuthorship W1963897385A5006313340 @default.
• W1963897385 hasAuthorship W1963897385A5016011913 @default.
• W1963897385 hasAuthorship W1963897385A5020527095 @default.
• W1963897385 hasAuthorship W1963897385A5030168190 @default.
• W1963897385 hasAuthorship W1963897385A5055815607 @default.
• W1963897385 hasConcept C113196181 @default.
• W1963897385 hasConcept C127413603 @default.
• W1963897385 hasConcept C137637335 @default.
• W1963897385 hasConcept C145148216 @default.
• W1963897385 hasConcept C171250308 @default.
• W1963897385 hasConcept C175708663 @default.
• W1963897385 hasConcept C17744445 @default.
• W1963897385 hasConcept C178790620 @default.
• W1963897385 hasConcept C185592680 @default.
• W1963897385 hasConcept C19067145 @default.
• W1963897385 hasConcept C191897082 @default.
• W1963897385 hasConcept C192562407 @default.
• W1963897385 hasConcept C199539241 @default.
• W1963897385 hasConcept C22423302 @default.
• W1963897385 hasConcept C2777431650 @default.
• W1963897385 hasConcept C2779105228 @default.
• W1963897385 hasConcept C2779851234 @default.
• W1963897385 hasConcept C32424582 @default.
• W1963897385 hasConcept C42360764 @default.
• W1963897385 hasConcept C49040817 @default.
• W1963897385 hasConcept C544956773 @default.
• W1963897385 hasConcept C57863236 @default.
• W1963897385 hasConcept C74080474 @default.
• W1963897385 hasConcept C77671233 @default.
• W1963897385 hasConcept C8010536 @default.
• W1963897385 hasConcept C94625758 @default.
• W1963897385 hasConceptScore W1963897385C113196181 @default.
• W1963897385 hasConceptScore W1963897385C127413603 @default.
• W1963897385 hasConceptScore W1963897385C137637335 @default.
• W1963897385 hasConceptScore W1963897385C145148216 @default.
• W1963897385 hasConceptScore W1963897385C171250308 @default.
• W1963897385 hasConceptScore W1963897385C175708663 @default.
• W1963897385 hasConceptScore W1963897385C17744445 @default.
• W1963897385 hasConceptScore W1963897385C178790620 @default.
• W1963897385 hasConceptScore W1963897385C185592680 @default.
• W1963897385 hasConceptScore W1963897385C19067145 @default.
• W1963897385 hasConceptScore W1963897385C191897082 @default.
• W1963897385 hasConceptScore W1963897385C192562407 @default.
• W1963897385 hasConceptScore W1963897385C199539241 @default.
• W1963897385 hasConceptScore W1963897385C22423302 @default.
• W1963897385 hasConceptScore W1963897385C2777431650 @default.
• W1963897385 hasConceptScore W1963897385C2779105228 @default.
• W1963897385 hasConceptScore W1963897385C2779851234 @default.
• W1963897385 hasConceptScore W1963897385C32424582 @default.
• W1963897385 hasConceptScore W1963897385C42360764 @default.
• W1963897385 hasConceptScore W1963897385C49040817 @default.
• W1963897385 hasConceptScore W1963897385C544956773 @default.
• W1963897385 hasConceptScore W1963897385C57863236 @default.
• W1963897385 hasConceptScore W1963897385C74080474 @default.
• W1963897385 hasConceptScore W1963897385C77671233 @default.
• W1963897385 hasConceptScore W1963897385C8010536 @default.
• W1963897385 hasConceptScore W1963897385C94625758 @default.
• W1963897385 hasLocation W19638973851 @default.
• W1963897385 hasOpenAccess W1963897385 @default.
• W1963897385 hasPrimaryLocation W19638973851 @default.
• W1963897385 hasRelatedWork W1963897385 @default.
• W1963897385 hasRelatedWork W2057977794 @default.
• W1963897385 hasRelatedWork W2076758935 @default.
• W1963897385 hasRelatedWork W2080362364 @default.
• W1963897385 hasRelatedWork W2117727627 @default.

• next