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• W1963905249 abstract "We investigated the chemical shift of the electron energy-loss near-edge structure (ELNES) for the nitrogen K-edge and titanium L3-edge measured from the interface region between a titanium nitride layer and a titanium layer. Both the titanium nitride and titanium layers were prepared by a sputtering method. Elemental analysis for nitride and titanium in the vicinity of the interface region was performed using a standard technique in electron energy-loss spectroscopy. It was demonstrated that both the ELNES of nitrogen K-edge and titanium L3-edge presented the chemical shift, more or less, depending on the composition of TiNx. The experimental findings were interpreted using a first-principles band structure calculation. The chemical shifts of nitrogen K-edge and titanium L3-edge can be used as fingerprinting for readily distinguishing the composition of TiNx." @default.
• W1963905249 created "2016-06-24" @default.
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• W1963905249 date "2009-03-16" @default.
• W1963905249 modified "2023-09-26" @default.
• W1963905249 title "Chemical Shift of Electron Energy-Loss Near-Edge Structure on the Nitrogen K-Edge and Titanium L₃-Edge at TiN/Ti Interface" @default.
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• W1963905249 doi "https://doi.org/10.1017/s1431927609090175" @default.
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