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- W1963990309 endingPage "293" @default.
- W1963990309 startingPage "283" @default.
- W1963990309 abstract "Scanning Force Microscope images of silicon surface morphology are presented for samples exposed to various oxidizing environments followed by oxide removal. These are contrasted with samples exposed to HNO3HF solutions. The former samples consistently produced surface roughness on the order of a few nanometers, while the latter solution exhibited surface roughness of several hundred to over a thousand nanometers. This rough surface is photoluminescent and is known as porous silicon. Careful observation of the onset of the reaction (which is proceeded by a concentration dependent induction period) suggests that the reaction mechanism is autocatalytic; some etchant product species catalyzes the further attack of the surface. Surface features of co-existing fluorescing and non-fluorescing regions emphasize the heavy etching present in the porous silicon region. Local control of the porous silicon formation by a photoinduced etching process is reported for the first time suggesting the possibility of a non-resist lithographic procedure." @default.
- W1963990309 created "2016-06-24" @default.
- W1963990309 creator A5008731378 @default.
- W1963990309 creator A5030120711 @default.
- W1963990309 creator A5037211950 @default.
- W1963990309 creator A5037889348 @default.
- W1963990309 date "1995-12-01" @default.
- W1963990309 modified "2023-10-03" @default.
- W1963990309 title "Chemical etching of silicon: Smooth, rough, and glowing surfaces" @default.
- W1963990309 cites W1504539634 @default.
- W1963990309 cites W1560798185 @default.
- W1963990309 cites W1970661643 @default.
- W1963990309 cites W2003368639 @default.
- W1963990309 cites W2027253828 @default.
- W1963990309 cites W2063140846 @default.
- W1963990309 cites W2066600857 @default.
- W1963990309 cites W2087678801 @default.
- W1963990309 cites W2121286028 @default.
- W1963990309 cites W2310418687 @default.
- W1963990309 doi "https://doi.org/10.1016/0079-6816(95)00062-3" @default.
- W1963990309 hasPublicationYear "1995" @default.
- W1963990309 type Work @default.
- W1963990309 sameAs 1963990309 @default.
- W1963990309 citedByCount "26" @default.
- W1963990309 countsByYear W19639903092012 @default.
- W1963990309 countsByYear W19639903092013 @default.
- W1963990309 countsByYear W19639903092014 @default.
- W1963990309 countsByYear W19639903092015 @default.
- W1963990309 countsByYear W19639903092017 @default.
- W1963990309 countsByYear W19639903092018 @default.
- W1963990309 countsByYear W19639903092023 @default.
- W1963990309 crossrefType "journal-article" @default.
- W1963990309 hasAuthorship W1963990309A5008731378 @default.
- W1963990309 hasAuthorship W1963990309A5030120711 @default.
- W1963990309 hasAuthorship W1963990309A5037211950 @default.
- W1963990309 hasAuthorship W1963990309A5037889348 @default.
- W1963990309 hasConcept C100460472 @default.
- W1963990309 hasConcept C107365816 @default.
- W1963990309 hasConcept C127413603 @default.
- W1963990309 hasConcept C159985019 @default.
- W1963990309 hasConcept C171250308 @default.
- W1963990309 hasConcept C178790620 @default.
- W1963990309 hasConcept C185592680 @default.
- W1963990309 hasConcept C192562407 @default.
- W1963990309 hasConcept C204223013 @default.
- W1963990309 hasConcept C2776685891 @default.
- W1963990309 hasConcept C2779227376 @default.
- W1963990309 hasConcept C33220542 @default.
- W1963990309 hasConcept C42360764 @default.
- W1963990309 hasConcept C49040817 @default.
- W1963990309 hasConcept C53524968 @default.
- W1963990309 hasConcept C544956773 @default.
- W1963990309 hasConcept C6648577 @default.
- W1963990309 hasConcept C71039073 @default.
- W1963990309 hasConcept C77066764 @default.
- W1963990309 hasConcept C77176794 @default.
- W1963990309 hasConceptScore W1963990309C100460472 @default.
- W1963990309 hasConceptScore W1963990309C107365816 @default.
- W1963990309 hasConceptScore W1963990309C127413603 @default.
- W1963990309 hasConceptScore W1963990309C159985019 @default.
- W1963990309 hasConceptScore W1963990309C171250308 @default.
- W1963990309 hasConceptScore W1963990309C178790620 @default.
- W1963990309 hasConceptScore W1963990309C185592680 @default.
- W1963990309 hasConceptScore W1963990309C192562407 @default.
- W1963990309 hasConceptScore W1963990309C204223013 @default.
- W1963990309 hasConceptScore W1963990309C2776685891 @default.
- W1963990309 hasConceptScore W1963990309C2779227376 @default.
- W1963990309 hasConceptScore W1963990309C33220542 @default.
- W1963990309 hasConceptScore W1963990309C42360764 @default.
- W1963990309 hasConceptScore W1963990309C49040817 @default.
- W1963990309 hasConceptScore W1963990309C53524968 @default.
- W1963990309 hasConceptScore W1963990309C544956773 @default.
- W1963990309 hasConceptScore W1963990309C6648577 @default.
- W1963990309 hasConceptScore W1963990309C71039073 @default.
- W1963990309 hasConceptScore W1963990309C77066764 @default.
- W1963990309 hasConceptScore W1963990309C77176794 @default.
- W1963990309 hasIssue "1-4" @default.
- W1963990309 hasLocation W19639903091 @default.
- W1963990309 hasOpenAccess W1963990309 @default.
- W1963990309 hasPrimaryLocation W19639903091 @default.
- W1963990309 hasRelatedWork W1576206051 @default.
- W1963990309 hasRelatedWork W1974715479 @default.
- W1963990309 hasRelatedWork W2053533973 @default.
- W1963990309 hasRelatedWork W2063793805 @default.
- W1963990309 hasRelatedWork W2354753332 @default.
- W1963990309 hasRelatedWork W2803735186 @default.
- W1963990309 hasRelatedWork W2995254107 @default.
- W1963990309 hasRelatedWork W3133959772 @default.
- W1963990309 hasRelatedWork W855339729 @default.
- W1963990309 hasRelatedWork W2182254074 @default.
- W1963990309 hasVolume "50" @default.
- W1963990309 isParatext "false" @default.
- W1963990309 isRetracted "false" @default.
- W1963990309 magId "1963990309" @default.
- W1963990309 workType "article" @default.