Matches in SemOpenAlex for { <https://semopenalex.org/work/W1963992102> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W1963992102 endingPage "096003" @default.
- W1963992102 startingPage "096003" @default.
- W1963992102 abstract "A lithography-independent and wafer scale method to fabricate a metal nanogap structure is demonstrated. Polysilicon was first dry etched using photoresist (PR) as the etch mask patterned by photolithography. Then, by depositing conformal SiO2 on the polysilicon pattern, etching back SiO2 anisotropically in the perpendicular direction and removing the polysilicon with KOH, a sacrificial SiO2 spacer was obtained. Finally, after metal evaporation and lifting-off of the SiO2 spacer, an 82 nm metal-gap structure was achieved. The size of the nanogap is not determined by the photolithography, but by the thickness of the SiO2. The method reported in this paper is compatible with modern semiconductor technology and can be used in mass production." @default.
- W1963992102 created "2016-06-24" @default.
- W1963992102 creator A5010305623 @default.
- W1963992102 creator A5010642871 @default.
- W1963992102 creator A5028287235 @default.
- W1963992102 creator A5041097208 @default.
- W1963992102 creator A5066542260 @default.
- W1963992102 creator A5085703749 @default.
- W1963992102 date "2009-09-01" @default.
- W1963992102 modified "2023-09-24" @default.
- W1963992102 title "Lithography-independent and large scale fabrication of a metal electrode nanogap" @default.
- W1963992102 cites W1969237062 @default.
- W1963992102 cites W1978566909 @default.
- W1963992102 cites W2017987311 @default.
- W1963992102 cites W2034714459 @default.
- W1963992102 cites W2048440571 @default.
- W1963992102 cites W2055886368 @default.
- W1963992102 cites W2064724849 @default.
- W1963992102 cites W2068250568 @default.
- W1963992102 cites W2083838484 @default.
- W1963992102 cites W2084120765 @default.
- W1963992102 cites W2084419268 @default.
- W1963992102 cites W2166743480 @default.
- W1963992102 doi "https://doi.org/10.1088/1674-4926/30/9/096003" @default.
- W1963992102 hasPublicationYear "2009" @default.
- W1963992102 type Work @default.
- W1963992102 sameAs 1963992102 @default.
- W1963992102 citedByCount "2" @default.
- W1963992102 countsByYear W19639921022014 @default.
- W1963992102 crossrefType "journal-article" @default.
- W1963992102 hasAuthorship W1963992102A5010305623 @default.
- W1963992102 hasAuthorship W1963992102A5010642871 @default.
- W1963992102 hasAuthorship W1963992102A5028287235 @default.
- W1963992102 hasAuthorship W1963992102A5041097208 @default.
- W1963992102 hasAuthorship W1963992102A5066542260 @default.
- W1963992102 hasAuthorship W1963992102A5085703749 @default.
- W1963992102 hasConcept C121332964 @default.
- W1963992102 hasConcept C136525101 @default.
- W1963992102 hasConcept C142724271 @default.
- W1963992102 hasConcept C147789679 @default.
- W1963992102 hasConcept C171250308 @default.
- W1963992102 hasConcept C17525397 @default.
- W1963992102 hasConcept C185592680 @default.
- W1963992102 hasConcept C191897082 @default.
- W1963992102 hasConcept C192562407 @default.
- W1963992102 hasConcept C204223013 @default.
- W1963992102 hasConcept C204787440 @default.
- W1963992102 hasConcept C2778755073 @default.
- W1963992102 hasConcept C49040817 @default.
- W1963992102 hasConcept C544153396 @default.
- W1963992102 hasConcept C62520636 @default.
- W1963992102 hasConcept C71924100 @default.
- W1963992102 hasConceptScore W1963992102C121332964 @default.
- W1963992102 hasConceptScore W1963992102C136525101 @default.
- W1963992102 hasConceptScore W1963992102C142724271 @default.
- W1963992102 hasConceptScore W1963992102C147789679 @default.
- W1963992102 hasConceptScore W1963992102C171250308 @default.
- W1963992102 hasConceptScore W1963992102C17525397 @default.
- W1963992102 hasConceptScore W1963992102C185592680 @default.
- W1963992102 hasConceptScore W1963992102C191897082 @default.
- W1963992102 hasConceptScore W1963992102C192562407 @default.
- W1963992102 hasConceptScore W1963992102C204223013 @default.
- W1963992102 hasConceptScore W1963992102C204787440 @default.
- W1963992102 hasConceptScore W1963992102C2778755073 @default.
- W1963992102 hasConceptScore W1963992102C49040817 @default.
- W1963992102 hasConceptScore W1963992102C544153396 @default.
- W1963992102 hasConceptScore W1963992102C62520636 @default.
- W1963992102 hasConceptScore W1963992102C71924100 @default.
- W1963992102 hasIssue "9" @default.
- W1963992102 hasLocation W19639921021 @default.
- W1963992102 hasOpenAccess W1963992102 @default.
- W1963992102 hasPrimaryLocation W19639921021 @default.
- W1963992102 hasRelatedWork W1679770080 @default.
- W1963992102 hasRelatedWork W2077822372 @default.
- W1963992102 hasRelatedWork W2082879166 @default.
- W1963992102 hasRelatedWork W2111111951 @default.
- W1963992102 hasRelatedWork W2126492672 @default.
- W1963992102 hasRelatedWork W2154341828 @default.
- W1963992102 hasRelatedWork W2463224065 @default.
- W1963992102 hasRelatedWork W2890402440 @default.
- W1963992102 hasRelatedWork W3048283102 @default.
- W1963992102 hasRelatedWork W4211174049 @default.
- W1963992102 hasVolume "30" @default.
- W1963992102 isParatext "false" @default.
- W1963992102 isRetracted "false" @default.
- W1963992102 magId "1963992102" @default.
- W1963992102 workType "article" @default.