Matches in SemOpenAlex for { <https://semopenalex.org/work/W1964069277> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W1964069277 abstract "Micro-positioning stages fabricated using Micro Electro Mechanical Systems (MEMS) based processes have beencritical in enabling micro/nano manipulation and probing. These stages have been extensively used in micro-forcesensors, scanning probe microscopy and micro optical lens scanners. This paper presents the design, kinematic anddynamic analysis, fabrication and characterization of a novel monolithic micro-positioning XY stage. The design of theproposed micro-positioning stage is based on a Parallel Kinematic Mechanism (PKM). The PKM based designdecouples the motion in the XY direction. Additionally, it restricts the parasitic rotation of the end-effector (table) of themicro-positioning stage while providing an increased motion range. The motion of the stage is linear in the operatingrange thus simplifying its kinematics. The truss like parallel kinematic mechanism design of the stage structure reducesits mass while keeping the stage stiffness high. This leads to a high natural frequency of the micro-positioning stage(1250Hz) and a high Q-factor of 156. The stage mechanism is fabricated on a Silicon-On-Insulator (SOI) substrate and isactuated by integrated electrostatic rotary comb drives. The fabrication process uses multi-layer patterning along with anInductively Coupled Plasma Deep Reactive Ion Etching (ICP-DRIE). The use of ICP-DRIE enables the high aspect ratioetching that is required for the stage fabrication and its optimal actuation using the integrated electrostatic rotary combdrives. The fabricated stages have a motion range of more than 30 microns of decoupled displacements along the X andY directions at a driving voltage of 200V." @default.
- W1964069277 created "2016-06-24" @default.
- W1964069277 creator A5004826420 @default.
- W1964069277 creator A5037450549 @default.
- W1964069277 creator A5037686204 @default.
- W1964069277 date "2008-02-07" @default.
- W1964069277 modified "2023-09-23" @default.
- W1964069277 title "Parallel-kinematic-mechanism-based monolithic XY micropositioning stage with rotary comb drive actuators" @default.
- W1964069277 doi "https://doi.org/10.1117/12.762358" @default.
- W1964069277 hasPublicationYear "2008" @default.
- W1964069277 type Work @default.
- W1964069277 sameAs 1964069277 @default.
- W1964069277 citedByCount "4" @default.
- W1964069277 crossrefType "proceedings-article" @default.
- W1964069277 hasAuthorship W1964069277A5004826420 @default.
- W1964069277 hasAuthorship W1964069277A5037450549 @default.
- W1964069277 hasAuthorship W1964069277A5037686204 @default.
- W1964069277 hasConcept C100460472 @default.
- W1964069277 hasConcept C119599485 @default.
- W1964069277 hasConcept C121332964 @default.
- W1964069277 hasConcept C124634506 @default.
- W1964069277 hasConcept C127413603 @default.
- W1964069277 hasConcept C130472188 @default.
- W1964069277 hasConcept C135628077 @default.
- W1964069277 hasConcept C136525101 @default.
- W1964069277 hasConcept C142724271 @default.
- W1964069277 hasConcept C171250308 @default.
- W1964069277 hasConcept C172707124 @default.
- W1964069277 hasConcept C192562407 @default.
- W1964069277 hasConcept C204787440 @default.
- W1964069277 hasConcept C2779227376 @default.
- W1964069277 hasConcept C37977207 @default.
- W1964069277 hasConcept C39920418 @default.
- W1964069277 hasConcept C49040817 @default.
- W1964069277 hasConcept C527607 @default.
- W1964069277 hasConcept C66938386 @default.
- W1964069277 hasConcept C71924100 @default.
- W1964069277 hasConcept C74650414 @default.
- W1964069277 hasConcept C79772673 @default.
- W1964069277 hasConceptScore W1964069277C100460472 @default.
- W1964069277 hasConceptScore W1964069277C119599485 @default.
- W1964069277 hasConceptScore W1964069277C121332964 @default.
- W1964069277 hasConceptScore W1964069277C124634506 @default.
- W1964069277 hasConceptScore W1964069277C127413603 @default.
- W1964069277 hasConceptScore W1964069277C130472188 @default.
- W1964069277 hasConceptScore W1964069277C135628077 @default.
- W1964069277 hasConceptScore W1964069277C136525101 @default.
- W1964069277 hasConceptScore W1964069277C142724271 @default.
- W1964069277 hasConceptScore W1964069277C171250308 @default.
- W1964069277 hasConceptScore W1964069277C172707124 @default.
- W1964069277 hasConceptScore W1964069277C192562407 @default.
- W1964069277 hasConceptScore W1964069277C204787440 @default.
- W1964069277 hasConceptScore W1964069277C2779227376 @default.
- W1964069277 hasConceptScore W1964069277C37977207 @default.
- W1964069277 hasConceptScore W1964069277C39920418 @default.
- W1964069277 hasConceptScore W1964069277C49040817 @default.
- W1964069277 hasConceptScore W1964069277C527607 @default.
- W1964069277 hasConceptScore W1964069277C66938386 @default.
- W1964069277 hasConceptScore W1964069277C71924100 @default.
- W1964069277 hasConceptScore W1964069277C74650414 @default.
- W1964069277 hasConceptScore W1964069277C79772673 @default.
- W1964069277 hasLocation W19640692771 @default.
- W1964069277 hasOpenAccess W1964069277 @default.
- W1964069277 hasPrimaryLocation W19640692771 @default.
- W1964069277 hasRelatedWork W1551588517 @default.
- W1964069277 hasRelatedWork W2016553371 @default.
- W1964069277 hasRelatedWork W2043642088 @default.
- W1964069277 hasRelatedWork W2347527612 @default.
- W1964069277 hasRelatedWork W2354642913 @default.
- W1964069277 hasRelatedWork W2384143566 @default.
- W1964069277 hasRelatedWork W2748952813 @default.
- W1964069277 hasRelatedWork W2898913251 @default.
- W1964069277 hasRelatedWork W2899084033 @default.
- W1964069277 hasRelatedWork W2186725032 @default.
- W1964069277 isParatext "false" @default.
- W1964069277 isRetracted "false" @default.
- W1964069277 magId "1964069277" @default.
- W1964069277 workType "article" @default.