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- W1964135325 abstract "An electron-beam sensitive inorganic-organic hybrid SiO<SUB>2</SUB>TiO<SUB>2</SUB> glass was synthesized for the fabrication of structures with sub-micron sized features. The sensitivity of the sol-gel material was characterized with the electron beam dosage and the optimized doses were found to cross-link the material for sub-micron structures. Due to its properties of low thermal expansion, good mechanical strength and chemical durability, the sol-gel material can be used as resistance in the dry etching process in optoelectronics fabrications. For micro-optical elements, the diffractive optical elements can be fabricated directly into the sol-gel glass without etching." @default.
- W1964135325 created "2016-06-24" @default.
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- W1964135325 date "2001-10-29" @default.
- W1964135325 modified "2023-10-18" @default.
- W1964135325 title "Fabrication of submicron-sized structures on hybrid sol-gel glass with electron-beam lithography" @default.
- W1964135325 doi "https://doi.org/10.1117/12.446535" @default.
- W1964135325 hasPublicationYear "2001" @default.
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