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- W1964228163 endingPage "3531" @default.
- W1964228163 startingPage "3523" @default.
- W1964228163 abstract "The surface stoichiometry, surface morphology, and electrical conductivity of AlN, GaN, InN, InGaN, and InAlN were examined at rapid thermal annealing temperatures up to 1150 °C. The sheet resistance of the AlN dropped steadily with annealing, but the surface showed signs of roughening only above 1000 °C. Auger electron spectroscopy (AES) analysis showed little change in the surface stoichiometry even at 1150 °C. GaN root mean square (rms) surface roughness showed an overall improvement with annealing, but the surface became pitted at 1000 °C, at which point the sheet resistance also dropped by several orders of magnitude, and AES confirmed a loss of N from the surface. The InN surface had roughened considerably even at 650 °C, and scanning electron microscopy showed significant degradation. In contrast to the binary nitrides, the sheet resistance of InAlN was found to increase by ∼102 from the as grown value (3.2×10−3 Ω cm) after annealing at 800 °C and then remain constant up to 1000 °C, while that of InGaN increased by two orders of magnitude between 700 and 900 °C. The rms roughness increased above 800 and 700 °C, respectively, for InAlN and InGaN samples. In droplets began to form on the surface at 900 °C for InAlN and at 800 °C for InGaN, and then evaporate at 1000 °C, leaving pits. AES analysis showed a decrease in the N concentration in the top 500 Å of the sample for annealing ≥800 °C in both materials." @default.
- W1964228163 created "2016-06-24" @default.
- W1964228163 creator A5026141876 @default.
- W1964228163 date "1996-11-01" @default.
- W1964228163 modified "2023-09-27" @default.
- W1964228163 title "High temperature surface degradation of III–V nitrides" @default.
- W1964228163 doi "https://doi.org/10.1116/1.588792" @default.
- W1964228163 hasPublicationYear "1996" @default.
- W1964228163 type Work @default.
- W1964228163 sameAs 1964228163 @default.
- W1964228163 citedByCount "51" @default.
- W1964228163 countsByYear W19642281632012 @default.
- W1964228163 countsByYear W19642281632014 @default.
- W1964228163 countsByYear W19642281632016 @default.
- W1964228163 countsByYear W19642281632017 @default.
- W1964228163 countsByYear W19642281632018 @default.
- W1964228163 crossrefType "journal-article" @default.
- W1964228163 hasAuthorship W1964228163A5026141876 @default.
- W1964228163 hasBestOaLocation W19642281632 @default.
- W1964228163 hasConcept C107365816 @default.
- W1964228163 hasConcept C113196181 @default.
- W1964228163 hasConcept C121332964 @default.
- W1964228163 hasConcept C144082473 @default.
- W1964228163 hasConcept C159985019 @default.
- W1964228163 hasConcept C178790620 @default.
- W1964228163 hasConcept C185544564 @default.
- W1964228163 hasConcept C185592680 @default.
- W1964228163 hasConcept C191897082 @default.
- W1964228163 hasConcept C192562407 @default.
- W1964228163 hasConcept C194760766 @default.
- W1964228163 hasConcept C25442681 @default.
- W1964228163 hasConcept C26771246 @default.
- W1964228163 hasConcept C2777855556 @default.
- W1964228163 hasConcept C2779227376 @default.
- W1964228163 hasConcept C43617362 @default.
- W1964228163 hasConcept C66825105 @default.
- W1964228163 hasConcept C71039073 @default.
- W1964228163 hasConceptScore W1964228163C107365816 @default.
- W1964228163 hasConceptScore W1964228163C113196181 @default.
- W1964228163 hasConceptScore W1964228163C121332964 @default.
- W1964228163 hasConceptScore W1964228163C144082473 @default.
- W1964228163 hasConceptScore W1964228163C159985019 @default.
- W1964228163 hasConceptScore W1964228163C178790620 @default.
- W1964228163 hasConceptScore W1964228163C185544564 @default.
- W1964228163 hasConceptScore W1964228163C185592680 @default.
- W1964228163 hasConceptScore W1964228163C191897082 @default.
- W1964228163 hasConceptScore W1964228163C192562407 @default.
- W1964228163 hasConceptScore W1964228163C194760766 @default.
- W1964228163 hasConceptScore W1964228163C25442681 @default.
- W1964228163 hasConceptScore W1964228163C26771246 @default.
- W1964228163 hasConceptScore W1964228163C2777855556 @default.
- W1964228163 hasConceptScore W1964228163C2779227376 @default.
- W1964228163 hasConceptScore W1964228163C43617362 @default.
- W1964228163 hasConceptScore W1964228163C66825105 @default.
- W1964228163 hasConceptScore W1964228163C71039073 @default.
- W1964228163 hasIssue "6" @default.
- W1964228163 hasLocation W19642281631 @default.
- W1964228163 hasLocation W19642281632 @default.
- W1964228163 hasOpenAccess W1964228163 @default.
- W1964228163 hasPrimaryLocation W19642281631 @default.
- W1964228163 hasRelatedWork W1935463854 @default.
- W1964228163 hasRelatedWork W1973943890 @default.
- W1964228163 hasRelatedWork W1978925083 @default.
- W1964228163 hasRelatedWork W1999569901 @default.
- W1964228163 hasRelatedWork W2010335351 @default.
- W1964228163 hasRelatedWork W2052997055 @default.
- W1964228163 hasRelatedWork W2132635108 @default.
- W1964228163 hasRelatedWork W2150434797 @default.
- W1964228163 hasRelatedWork W2150998405 @default.
- W1964228163 hasRelatedWork W2348532595 @default.
- W1964228163 hasVolume "14" @default.
- W1964228163 isParatext "false" @default.
- W1964228163 isRetracted "false" @default.
- W1964228163 magId "1964228163" @default.
- W1964228163 workType "article" @default.