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- W1964411061 abstract "Two types of polysilicon surface-micromachined actuators designed for moving hinged micromirrors are described. An electrostatic comb-drive actuator comprised of interdigitated capacitors has been used to move a mirror at frequencies of at least a kHz. Impact-actuated linear vibromotors allow mirrors to travel over large (> 100 micrometers ) ranges with submicron positioning." @default.
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- W1964411061 date "1996-03-08" @default.
- W1964411061 modified "2023-09-26" @default.
- W1964411061 title "<title>Actuation of polysilicon surface-micromachined mirrors</title>" @default.
- W1964411061 doi "https://doi.org/10.1117/12.234636" @default.
- W1964411061 hasPublicationYear "1996" @default.
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