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- W1964538863 abstract "The method of metal-organic molecular beam epitaxy (MOMBE, or chemical beam epitaxy (CBE)) is basically the metal-organic vapour phase epitaxy (MOVPE) process carried out at extremely low pressures. Layers and device structures of group III–V elements have been grown by MOMBE that are of excellent quality and uniformity with regard to layer thickness and material composition. A striking feature is the superior selectivity of the growth process, opening new possibilities for the integration of electronic and optoelectronic devices. However, since MOMBE is a very recent epitaxial method it needs further development in the area of doping and in tailoring of starting materials particularly designed for MOMBE applications." @default.
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- W1964538863 date "1991-07-01" @default.
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- W1964538863 title "Potentially and challenge of metal-organic molecular beam epitaxy" @default.
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- W1964538863 doi "https://doi.org/10.1016/0921-5107(91)90153-m" @default.
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