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- W1964542368 abstract "High strength reaction-bonded silicon carbide ceramics was successfully produced by reducing the amount of residual silicon and the silicon pocket size with carbon black as an additional carbon source. A prototype of wafer carrier was also produced in near-net dimension by planar contact infiltration of molten silicon into a preform joined with six pieces of simple shape by eliminating process shrinkages. Forming shrinkages were decreased to a negligible level by compression molding, while sintering shrinkage was eliminated by reactive infiltration of molten silicon." @default.
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- W1964542368 date "2005-06-01" @default.
- W1964542368 modified "2023-10-04" @default.
- W1964542368 title "Effect of Carbon Black Addition on Reaction-Bonded Silicon Carbide Ceramics" @default.
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- W1964542368 doi "https://doi.org/10.4028/www.scientific.net/kem.287.189" @default.
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