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- W1964552427 abstract "Distributions of via Depth and bottom CD for TSV wafer have been studied by scanning interference microscopy(Unifire 7900, Nanometrics Inc.). We plotted whole wafer maps for each via depth and bottom CD and found usefulrelationship between them (i.e. via depth is in inverse proportion to bottom CD in general). Average values of via depthand bottom CD are ~60um and ~4um and their standard deviation values are 1.28% and 5.14% respectively. We alsodemonstrated kinds of defects at via top (or bottom) which can cause disturbance of total via count during 3D inspection.Our results can be a good introduction to scanning interference tool as a monitoring tool for TSV high volumemanufacturing." @default.
- W1964552427 created "2016-06-24" @default.
- W1964552427 creator A5036450738 @default.
- W1964552427 creator A5040742433 @default.
- W1964552427 creator A5045468765 @default.
- W1964552427 creator A5048056131 @default.
- W1964552427 creator A5052472265 @default.
- W1964552427 creator A5060449666 @default.
- W1964552427 creator A5076693404 @default.
- W1964552427 creator A5080556169 @default.
- W1964552427 creator A5083345983 @default.
- W1964552427 creator A5088010007 @default.
- W1964552427 date "2012-03-29" @default.
- W1964552427 modified "2023-09-26" @default.
- W1964552427 title "Defect distribution study at through silicon via (TSV) bottom by scanning white-light interference microscopy" @default.
- W1964552427 cites W2092469929 @default.
- W1964552427 cites W595334616 @default.
- W1964552427 doi "https://doi.org/10.1117/12.917797" @default.
- W1964552427 hasPublicationYear "2012" @default.
- W1964552427 type Work @default.
- W1964552427 sameAs 1964552427 @default.
- W1964552427 citedByCount "0" @default.
- W1964552427 crossrefType "proceedings-article" @default.
- W1964552427 hasAuthorship W1964552427A5036450738 @default.
- W1964552427 hasAuthorship W1964552427A5040742433 @default.
- W1964552427 hasAuthorship W1964552427A5045468765 @default.
- W1964552427 hasAuthorship W1964552427A5048056131 @default.
- W1964552427 hasAuthorship W1964552427A5052472265 @default.
- W1964552427 hasAuthorship W1964552427A5060449666 @default.
- W1964552427 hasAuthorship W1964552427A5076693404 @default.
- W1964552427 hasAuthorship W1964552427A5080556169 @default.
- W1964552427 hasAuthorship W1964552427A5083345983 @default.
- W1964552427 hasAuthorship W1964552427A5088010007 @default.
- W1964552427 hasConcept C120665830 @default.
- W1964552427 hasConcept C121332964 @default.
- W1964552427 hasConcept C127162648 @default.
- W1964552427 hasConcept C147080431 @default.
- W1964552427 hasConcept C152194808 @default.
- W1964552427 hasConcept C159985019 @default.
- W1964552427 hasConcept C160671074 @default.
- W1964552427 hasConcept C192562407 @default.
- W1964552427 hasConcept C26771246 @default.
- W1964552427 hasConcept C32022120 @default.
- W1964552427 hasConcept C41008148 @default.
- W1964552427 hasConcept C45632049 @default.
- W1964552427 hasConcept C49040817 @default.
- W1964552427 hasConcept C544956773 @default.
- W1964552427 hasConcept C76155785 @default.
- W1964552427 hasConcept C77017923 @default.
- W1964552427 hasConceptScore W1964552427C120665830 @default.
- W1964552427 hasConceptScore W1964552427C121332964 @default.
- W1964552427 hasConceptScore W1964552427C127162648 @default.
- W1964552427 hasConceptScore W1964552427C147080431 @default.
- W1964552427 hasConceptScore W1964552427C152194808 @default.
- W1964552427 hasConceptScore W1964552427C159985019 @default.
- W1964552427 hasConceptScore W1964552427C160671074 @default.
- W1964552427 hasConceptScore W1964552427C192562407 @default.
- W1964552427 hasConceptScore W1964552427C26771246 @default.
- W1964552427 hasConceptScore W1964552427C32022120 @default.
- W1964552427 hasConceptScore W1964552427C41008148 @default.
- W1964552427 hasConceptScore W1964552427C45632049 @default.
- W1964552427 hasConceptScore W1964552427C49040817 @default.
- W1964552427 hasConceptScore W1964552427C544956773 @default.
- W1964552427 hasConceptScore W1964552427C76155785 @default.
- W1964552427 hasConceptScore W1964552427C77017923 @default.
- W1964552427 hasLocation W19645524271 @default.
- W1964552427 hasOpenAccess W1964552427 @default.
- W1964552427 hasPrimaryLocation W19645524271 @default.
- W1964552427 hasRelatedWork W1963950572 @default.
- W1964552427 hasRelatedWork W1993556037 @default.
- W1964552427 hasRelatedWork W1996848877 @default.
- W1964552427 hasRelatedWork W1997910147 @default.
- W1964552427 hasRelatedWork W2003016428 @default.
- W1964552427 hasRelatedWork W2012439600 @default.
- W1964552427 hasRelatedWork W2030766783 @default.
- W1964552427 hasRelatedWork W2032651502 @default.
- W1964552427 hasRelatedWork W2042488244 @default.
- W1964552427 hasRelatedWork W2057616619 @default.
- W1964552427 hasRelatedWork W2095294395 @default.
- W1964552427 hasRelatedWork W2102998001 @default.
- W1964552427 hasRelatedWork W2922616462 @default.
- W1964552427 hasRelatedWork W2950583200 @default.
- W1964552427 hasRelatedWork W2973113652 @default.
- W1964552427 hasRelatedWork W3132870224 @default.
- W1964552427 hasRelatedWork W3203340957 @default.
- W1964552427 hasRelatedWork W1817689712 @default.
- W1964552427 hasRelatedWork W1994008957 @default.
- W1964552427 hasRelatedWork W2751742573 @default.
- W1964552427 isParatext "false" @default.
- W1964552427 isRetracted "false" @default.
- W1964552427 magId "1964552427" @default.
- W1964552427 workType "article" @default.