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• W1964570711 abstract "Abstract This paper describes the use of a focused 3 MeV proton beam to produce 3-dimensional microstructures in polym-ethylmethacrylate (PMMA). Scanning electron micrographs of 125 μm thick structures in PMMA are presented, such as microgears. A four-axis goniometer is used to tilt the sample to produce structures with a range of inclination angles in conjunction with a computer-controlled scanning system. Two eight-blade microturbines, the first 500 μm wide with a 10° tilt angle on each blade, the second, 1 mm-wide with a 25° tilt on each blade, are presented to illustrate the potential of this method for producing complex 3-dimensional microstructures. This technique is compared to the LIGA process (deep-etch X-ray lithography) and to UV laser induced polymerization which are both capable of producing deep (hundreds of microns), high aspect ratio structures. We conclude that high energy proton lithography compares favourably with these techniques." @default.
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• W1964570711 date "1998-03-01" @default.
• W1964570711 modified "2023-09-27" @default.
• W1964570711 title "Maskless fabrication of 3-dimensional microstructures in PMMA using a nuclear microprobe" @default.
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• W1964570711 doi "https://doi.org/10.1016/s0168-583x(97)00876-8" @default.
• W1964570711 hasPublicationYear "1998" @default.
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