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- W1964598417 abstract "Strongly intensity-dependent photobleaching was observed in polymethyl methacrylate films doped with acridine and irradiated by a KrF laser. The transmission of low intensity pulses (<2 MW/cm2) increased from <0.01% to 60% as the intensity of a single prior bleaching pulse increased from 3 to 4 MW/cm2. The implications of this result for image enhancement in excimer laser projection photolithography are discussed: features in the region of 0.2–0.3 μm may be printable by such techniques." @default.
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- W1964598417 date "1984-05-15" @default.
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- W1964598417 title "Intensity‐dependent photobleaching in thin polymer films by excimer laser: Lithographic implications" @default.
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- W1964598417 doi "https://doi.org/10.1063/1.94604" @default.
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