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- W1964616141 abstract "The microsecond, nanosecond, and femtosecond laser ablation of AlN ceramic with a transversely excited atmospheric (TEA) CO2 laser, KrF excimer laser, and Ti:sapphire laser is demonstrated. It is shown that the laser-induced thermal decomposition process occurs with a microsecond TEA CO2 laser and a nanosecond KrF excimer laser. With the microsecond and nanosecond laser-induced thermal decomposition process, the conductive aluminum line can be directly fabricated and very low resistance can be obtained with a TEA CO2 laser. In the case of femtosecond Ti:sapphire laser ablation, there are two different regimes of ablation rate-like metals. In addition, a nonthermal process without a chemical composition change of the ablated surface can be achieved successfully, which is evident from scanning electron microscopy observation and x-ray photoelectron spectroscopy analysis of the ablated surface." @default.
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- W1964616141 date "2001-03-01" @default.
- W1964616141 modified "2023-09-26" @default.
- W1964616141 title "Selective ablation of AlN ceramic using femtosecond, nanosecond, and microsecond pulsed laser" @default.
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- W1964616141 doi "https://doi.org/10.1063/1.1342805" @default.
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