FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1964637912> ?p ?o ?g. }

• W1964637912 abstract "Alternating Phase Shift Mask (APSM) Technology has been developed and successfully implemented for the poly gate of 65nm node Logic application at Intel. This paper discusses the optimization of the mask design rules and fabrication process in order to enable high volume manufacturability. Intel's APSM technology is based on a dual sided trenched architecture. To meet the stringent OPC requirements associated with patterning of narrow gates required for the 65nm node, Chrome width between the Zero and Pi aperture need to be minimized. Additionally, APSM lithography has an inherently low MEEF that furthermore, drives a narrower Chrome line as compared to the Binary approach. The double sided trenched structure with narrow Chrome lines are mechanically vulnerable and prone to damage when exposed to conventional mask processing steps. Therefore, new processing approaches were developed to minimize the damage to the patterned mask features. For example, cleaning processes were optimized to minimize Chrome & quartz damage while retaining the cleaning effectiveness. In addition, mask design rules were developed which ensured manufacturability. The narrow Chrome regions between the zero and Pi apertures severely restrict the tolerance for the placement of the second level resists edges with respect to the first level. UV Laser Writer based resist patterning capability, capable of providing the required Overlay tolerance, was developed, An AIMS based methodology was used to optimize the undercut and minimize the aerial image CD difference between the Zero and Pi apertures." @default.
• W1964637912 created "2016-06-24" @default.
• W1964637912 creator A5000844585 @default.
• W1964637912 creator A5005750337 @default.
• W1964637912 creator A5018401123 @default.
• W1964637912 creator A5026159258 @default.
• W1964637912 creator A5040581689 @default.
• W1964637912 creator A5040857807 @default.
• W1964637912 creator A5046193690 @default.
• W1964637912 creator A5047006802 @default.
• W1964637912 creator A5053602244 @default.
• W1964637912 creator A5062187564 @default.
• W1964637912 creator A5064380475 @default.
• W1964637912 creator A5071996833 @default.
• W1964637912 creator A5077452318 @default.
• W1964637912 creator A5083172064 @default.
• W1964637912 creator A5088201594 @default.
• W1964637912 date "2006-03-10" @default.
• W1964637912 modified "2023-09-27" @default.
• W1964637912 title "Alternating phase shift mask technology for 65nm logic applications" @default.
• W1964637912 doi "https://doi.org/10.1117/12.654691" @default.
• W1964637912 hasPublicationYear "2006" @default.
• W1964637912 type Work @default.
• W1964637912 sameAs 1964637912 @default.
• W1964637912 citedByCount "1" @default.
• W1964637912 crossrefType "proceedings-article" @default.
• W1964637912 hasAuthorship W1964637912A5000844585 @default.
• W1964637912 hasAuthorship W1964637912A5005750337 @default.
• W1964637912 hasAuthorship W1964637912A5018401123 @default.
• W1964637912 hasAuthorship W1964637912A5026159258 @default.
• W1964637912 hasAuthorship W1964637912A5040581689 @default.
• W1964637912 hasAuthorship W1964637912A5040857807 @default.
• W1964637912 hasAuthorship W1964637912A5046193690 @default.
• W1964637912 hasAuthorship W1964637912A5047006802 @default.
• W1964637912 hasAuthorship W1964637912A5053602244 @default.
• W1964637912 hasAuthorship W1964637912A5062187564 @default.
• W1964637912 hasAuthorship W1964637912A5064380475 @default.
• W1964637912 hasAuthorship W1964637912A5071996833 @default.
• W1964637912 hasAuthorship W1964637912A5077452318 @default.
• W1964637912 hasAuthorship W1964637912A5083172064 @default.
• W1964637912 hasAuthorship W1964637912A5088201594 @default.
• W1964637912 hasConcept C105487726 @default.
• W1964637912 hasConcept C119599485 @default.
• W1964637912 hasConcept C127413603 @default.
• W1964637912 hasConcept C136085584 @default.
• W1964637912 hasConcept C160671074 @default.
• W1964637912 hasConcept C171250308 @default.
• W1964637912 hasConcept C177409738 @default.
• W1964637912 hasConcept C192562407 @default.
• W1964637912 hasConcept C199360897 @default.
• W1964637912 hasConcept C204223013 @default.
• W1964637912 hasConcept C24326235 @default.
• W1964637912 hasConcept C2779227376 @default.
• W1964637912 hasConcept C2779292183 @default.
• W1964637912 hasConcept C41008148 @default.
• W1964637912 hasConcept C49040817 @default.
• W1964637912 hasConcept C53524968 @default.
• W1964637912 hasConcept C62064638 @default.
• W1964637912 hasConcept C62611344 @default.
• W1964637912 hasConcept C66018809 @default.
• W1964637912 hasConcept C66938386 @default.
• W1964637912 hasConcept C78371743 @default.
• W1964637912 hasConcept C78519656 @default.
• W1964637912 hasConceptScore W1964637912C105487726 @default.
• W1964637912 hasConceptScore W1964637912C119599485 @default.
• W1964637912 hasConceptScore W1964637912C127413603 @default.
• W1964637912 hasConceptScore W1964637912C136085584 @default.
• W1964637912 hasConceptScore W1964637912C160671074 @default.
• W1964637912 hasConceptScore W1964637912C171250308 @default.
• W1964637912 hasConceptScore W1964637912C177409738 @default.
• W1964637912 hasConceptScore W1964637912C192562407 @default.
• W1964637912 hasConceptScore W1964637912C199360897 @default.
• W1964637912 hasConceptScore W1964637912C204223013 @default.
• W1964637912 hasConceptScore W1964637912C24326235 @default.
• W1964637912 hasConceptScore W1964637912C2779227376 @default.
• W1964637912 hasConceptScore W1964637912C2779292183 @default.
• W1964637912 hasConceptScore W1964637912C41008148 @default.
• W1964637912 hasConceptScore W1964637912C49040817 @default.
• W1964637912 hasConceptScore W1964637912C53524968 @default.
• W1964637912 hasConceptScore W1964637912C62064638 @default.
• W1964637912 hasConceptScore W1964637912C62611344 @default.
• W1964637912 hasConceptScore W1964637912C66018809 @default.
• W1964637912 hasConceptScore W1964637912C66938386 @default.
• W1964637912 hasConceptScore W1964637912C78371743 @default.
• W1964637912 hasConceptScore W1964637912C78519656 @default.
• W1964637912 hasLocation W19646379121 @default.
• W1964637912 hasOpenAccess W1964637912 @default.
• W1964637912 hasPrimaryLocation W19646379121 @default.
• W1964637912 hasRelatedWork W1513422997 @default.
• W1964637912 hasRelatedWork W1964637912 @default.
• W1964637912 hasRelatedWork W1987195402 @default.
• W1964637912 hasRelatedWork W2009562288 @default.
• W1964637912 hasRelatedWork W2033266705 @default.
• W1964637912 hasRelatedWork W2050847819 @default.
• W1964637912 hasRelatedWork W2079044085 @default.
• W1964637912 hasRelatedWork W2793157920 @default.
• W1964637912 hasRelatedWork W2975301058 @default.
• W1964637912 hasRelatedWork W1964179680 @default.
• W1964637912 isParatext "false" @default.
• W1964637912 isRetracted "false" @default.

• next