Matches in SemOpenAlex for { <https://semopenalex.org/work/W1964672257> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W1964672257 endingPage "3142" @default.
- W1964672257 startingPage "3137" @default.
- W1964672257 abstract "Etching reaction of Si(100) is investigated by using Cl2 molecular beams with a hyperthermal translational energy up to 3.0 eV. The reaction rate is clearly enhanced by translational energy, and the threshold energy is 2.1 eV. The translational-energy-induced reaction rates are measured as a function of substrate temperature; the results closely fit Arrhenius plots as the sum of two components having activation energies of 2.7 and 1.2 eV. The higher energy, derived from the fit of the high-temperature region, agrees well with the pure thermal reaction, i.e., low-translational-energy reaction. The lower energy, which is observed here, is determined as the activation energy of the translational-energy-induced reaction. This energy is not affected by the translational energy from the threshold to 3.0 eV, whereas the etch rate increases with translational energy. These findings suggest that the translational energy contributes to the formation of a new chlorinated Si surface from which silicon chloride desorbs thermally with lower activation energy than from a chlorinated Si surface formed by a pure-thermal reaction." @default.
- W1964672257 created "2016-06-24" @default.
- W1964672257 creator A5047425995 @default.
- W1964672257 creator A5076937568 @default.
- W1964672257 date "1997-09-15" @default.
- W1964672257 modified "2023-09-23" @default.
- W1964672257 title "Stimulated etching of Si(100) by Cl2 molecular beams with hyperthermal translational energies" @default.
- W1964672257 cites W1966814643 @default.
- W1964672257 cites W1968917171 @default.
- W1964672257 cites W1982629312 @default.
- W1964672257 cites W1983931923 @default.
- W1964672257 cites W1988061901 @default.
- W1964672257 cites W1990469066 @default.
- W1964672257 cites W2010962170 @default.
- W1964672257 cites W2015692179 @default.
- W1964672257 cites W2019359936 @default.
- W1964672257 cites W2036510092 @default.
- W1964672257 cites W2053402315 @default.
- W1964672257 cites W2055536543 @default.
- W1964672257 cites W2056058227 @default.
- W1964672257 cites W2090275189 @default.
- W1964672257 cites W2164800776 @default.
- W1964672257 doi "https://doi.org/10.1063/1.366157" @default.
- W1964672257 hasPublicationYear "1997" @default.
- W1964672257 type Work @default.
- W1964672257 sameAs 1964672257 @default.
- W1964672257 citedByCount "6" @default.
- W1964672257 crossrefType "journal-article" @default.
- W1964672257 hasAuthorship W1964672257A5047425995 @default.
- W1964672257 hasAuthorship W1964672257A5076937568 @default.
- W1964672257 hasConcept C100460472 @default.
- W1964672257 hasConcept C102931765 @default.
- W1964672257 hasConcept C107861326 @default.
- W1964672257 hasConcept C111368507 @default.
- W1964672257 hasConcept C121332964 @default.
- W1964672257 hasConcept C127313418 @default.
- W1964672257 hasConcept C147789679 @default.
- W1964672257 hasConcept C161790260 @default.
- W1964672257 hasConcept C175113610 @default.
- W1964672257 hasConcept C178790620 @default.
- W1964672257 hasConcept C184779094 @default.
- W1964672257 hasConcept C185592680 @default.
- W1964672257 hasConcept C186370098 @default.
- W1964672257 hasConcept C204530211 @default.
- W1964672257 hasConcept C2777289219 @default.
- W1964672257 hasConcept C2779227376 @default.
- W1964672257 hasConcept C2992827107 @default.
- W1964672257 hasConcept C544956773 @default.
- W1964672257 hasConcept C62520636 @default.
- W1964672257 hasConcept C82160515 @default.
- W1964672257 hasConcept C86183883 @default.
- W1964672257 hasConcept C95121573 @default.
- W1964672257 hasConcept C97355855 @default.
- W1964672257 hasConceptScore W1964672257C100460472 @default.
- W1964672257 hasConceptScore W1964672257C102931765 @default.
- W1964672257 hasConceptScore W1964672257C107861326 @default.
- W1964672257 hasConceptScore W1964672257C111368507 @default.
- W1964672257 hasConceptScore W1964672257C121332964 @default.
- W1964672257 hasConceptScore W1964672257C127313418 @default.
- W1964672257 hasConceptScore W1964672257C147789679 @default.
- W1964672257 hasConceptScore W1964672257C161790260 @default.
- W1964672257 hasConceptScore W1964672257C175113610 @default.
- W1964672257 hasConceptScore W1964672257C178790620 @default.
- W1964672257 hasConceptScore W1964672257C184779094 @default.
- W1964672257 hasConceptScore W1964672257C185592680 @default.
- W1964672257 hasConceptScore W1964672257C186370098 @default.
- W1964672257 hasConceptScore W1964672257C204530211 @default.
- W1964672257 hasConceptScore W1964672257C2777289219 @default.
- W1964672257 hasConceptScore W1964672257C2779227376 @default.
- W1964672257 hasConceptScore W1964672257C2992827107 @default.
- W1964672257 hasConceptScore W1964672257C544956773 @default.
- W1964672257 hasConceptScore W1964672257C62520636 @default.
- W1964672257 hasConceptScore W1964672257C82160515 @default.
- W1964672257 hasConceptScore W1964672257C86183883 @default.
- W1964672257 hasConceptScore W1964672257C95121573 @default.
- W1964672257 hasConceptScore W1964672257C97355855 @default.
- W1964672257 hasIssue "6" @default.
- W1964672257 hasLocation W19646722571 @default.
- W1964672257 hasOpenAccess W1964672257 @default.
- W1964672257 hasPrimaryLocation W19646722571 @default.
- W1964672257 hasRelatedWork W1964672257 @default.
- W1964672257 hasRelatedWork W1995092945 @default.
- W1964672257 hasRelatedWork W2007262920 @default.
- W1964672257 hasRelatedWork W2013557620 @default.
- W1964672257 hasRelatedWork W2029845838 @default.
- W1964672257 hasRelatedWork W2052031297 @default.
- W1964672257 hasRelatedWork W2091210967 @default.
- W1964672257 hasRelatedWork W2120954841 @default.
- W1964672257 hasRelatedWork W2331397806 @default.
- W1964672257 hasRelatedWork W3016714518 @default.
- W1964672257 hasVolume "82" @default.
- W1964672257 isParatext "false" @default.
- W1964672257 isRetracted "false" @default.
- W1964672257 magId "1964672257" @default.
- W1964672257 workType "article" @default.