Matches in SemOpenAlex for { <https://semopenalex.org/work/W1964679140> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W1964679140 endingPage "5045" @default.
- W1964679140 startingPage "5042" @default.
- W1964679140 abstract "Registration markers are crucial in connecting scanning tunneling microscope (STM) lithographed nano- and atomic-scale devices to the outside world. In this paper we revisit an ultra high vacuum annealing method with a low thermal budget that is fully compatible with etched registration markers and results in clean 2 × 1 reconstructed Si(1 0 0) surfaces required for STM lithography. Surface contamination is prevented by chemically stripping and reforming a protective silicon oxide layer before transferring the sample to the vacuum system. This allows for annealing temperatures of only 900 °C, where normally carbon contaminants result in the formation of SiC clusters on the surface at annealing temperatures below 950 °C. Reactive ion etched marker structures with an etch depth of 60 nm and a typical lateral dimension of only 150 nm survive a 900 °C flash anneal." @default.
- W1964679140 created "2016-06-24" @default.
- W1964679140 creator A5025971682 @default.
- W1964679140 creator A5053669564 @default.
- W1964679140 creator A5082677558 @default.
- W1964679140 date "2010-06-01" @default.
- W1964679140 modified "2023-09-27" @default.
- W1964679140 title "A low temperature surface preparation method for STM nano-lithography on Si(100)" @default.
- W1964679140 cites W1977803570 @default.
- W1964679140 cites W2003985807 @default.
- W1964679140 cites W2005353978 @default.
- W1964679140 cites W2019189624 @default.
- W1964679140 cites W2033013230 @default.
- W1964679140 cites W2036054674 @default.
- W1964679140 cites W2051876016 @default.
- W1964679140 cites W2054216104 @default.
- W1964679140 cites W2058093399 @default.
- W1964679140 cites W2060727153 @default.
- W1964679140 cites W2063234164 @default.
- W1964679140 cites W2065754910 @default.
- W1964679140 cites W2080267377 @default.
- W1964679140 cites W2082347965 @default.
- W1964679140 cites W2084526144 @default.
- W1964679140 cites W2091000545 @default.
- W1964679140 cites W2094261103 @default.
- W1964679140 cites W2095411196 @default.
- W1964679140 cites W2104772873 @default.
- W1964679140 cites W2108117221 @default.
- W1964679140 cites W2479317271 @default.
- W1964679140 doi "https://doi.org/10.1016/j.apsusc.2010.03.052" @default.
- W1964679140 hasPublicationYear "2010" @default.
- W1964679140 type Work @default.
- W1964679140 sameAs 1964679140 @default.
- W1964679140 citedByCount "2" @default.
- W1964679140 countsByYear W19646791402013 @default.
- W1964679140 countsByYear W19646791402017 @default.
- W1964679140 crossrefType "journal-article" @default.
- W1964679140 hasAuthorship W1964679140A5025971682 @default.
- W1964679140 hasAuthorship W1964679140A5053669564 @default.
- W1964679140 hasAuthorship W1964679140A5082677558 @default.
- W1964679140 hasConcept C113196181 @default.
- W1964679140 hasConcept C159985019 @default.
- W1964679140 hasConcept C160671074 @default.
- W1964679140 hasConcept C171250308 @default.
- W1964679140 hasConcept C185592680 @default.
- W1964679140 hasConcept C191897082 @default.
- W1964679140 hasConcept C192562407 @default.
- W1964679140 hasConcept C204223013 @default.
- W1964679140 hasConcept C2777855556 @default.
- W1964679140 hasConcept C2779851234 @default.
- W1964679140 hasConcept C2780357685 @default.
- W1964679140 hasConcept C43617362 @default.
- W1964679140 hasConcept C49040817 @default.
- W1964679140 hasConcept C544956773 @default.
- W1964679140 hasConcept C6518042 @default.
- W1964679140 hasConcept C82225425 @default.
- W1964679140 hasConceptScore W1964679140C113196181 @default.
- W1964679140 hasConceptScore W1964679140C159985019 @default.
- W1964679140 hasConceptScore W1964679140C160671074 @default.
- W1964679140 hasConceptScore W1964679140C171250308 @default.
- W1964679140 hasConceptScore W1964679140C185592680 @default.
- W1964679140 hasConceptScore W1964679140C191897082 @default.
- W1964679140 hasConceptScore W1964679140C192562407 @default.
- W1964679140 hasConceptScore W1964679140C204223013 @default.
- W1964679140 hasConceptScore W1964679140C2777855556 @default.
- W1964679140 hasConceptScore W1964679140C2779851234 @default.
- W1964679140 hasConceptScore W1964679140C2780357685 @default.
- W1964679140 hasConceptScore W1964679140C43617362 @default.
- W1964679140 hasConceptScore W1964679140C49040817 @default.
- W1964679140 hasConceptScore W1964679140C544956773 @default.
- W1964679140 hasConceptScore W1964679140C6518042 @default.
- W1964679140 hasConceptScore W1964679140C82225425 @default.
- W1964679140 hasIssue "16" @default.
- W1964679140 hasLocation W19646791401 @default.
- W1964679140 hasOpenAccess W1964679140 @default.
- W1964679140 hasPrimaryLocation W19646791401 @default.
- W1964679140 hasRelatedWork W1618995463 @default.
- W1964679140 hasRelatedWork W1921331855 @default.
- W1964679140 hasRelatedWork W1964478537 @default.
- W1964679140 hasRelatedWork W2002504916 @default.
- W1964679140 hasRelatedWork W2006260406 @default.
- W1964679140 hasRelatedWork W2026213874 @default.
- W1964679140 hasRelatedWork W2028024115 @default.
- W1964679140 hasRelatedWork W2131691241 @default.
- W1964679140 hasRelatedWork W2214936313 @default.
- W1964679140 hasRelatedWork W3009661934 @default.
- W1964679140 hasVolume "256" @default.
- W1964679140 isParatext "false" @default.
- W1964679140 isRetracted "false" @default.
- W1964679140 magId "1964679140" @default.
- W1964679140 workType "article" @default.