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- W1964690187 abstract "Small doping profiles, the so-called δ-layers, of boron and antimony with the width of a few atomic layers can be embedded in crystalline Si(0 0 1) by a special MBE technique. X-ray reflectivity measurements were made on a triple Sb-δ-layer, yielding both doping depth and dopand profile of the single layers. Results show that the width of the layer caused by diffusion is less than 1 nm." @default.
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- W1964690187 date "1994-04-01" @default.
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- W1964690187 title "X-ray reflectivity of multiple delta-type doping profiles in silicon" @default.
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- W1964690187 doi "https://doi.org/10.1016/0921-4526(94)90173-2" @default.
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