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- W1964735178 abstract "The thermal oxidation of silicon has been investigated in an industrial environment. The growth characteristics and the electrical properties of the oxides resulting from H 2 O 2 , trichloroethane (TCA)O 2 and HClO 2 mixtures have been compared. It is shown that the oxidation rate for TCAO 2 is approximately 30–40% higher than for HClO 2 mixtures and comparable electrical properties can be readily obtained. A 1 mol.%TCAO 2 mixture gives the optimum process for very-large scale integration applications. The overall mechanism governing the processes are similar. However, the TCA process is a safer and cleaner alternative." @default.
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- W1964735178 date "1993-01-01" @default.
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- W1964735178 title "Oxidation of silicon using trichloroethaneO2 and HClO2 mixtures" @default.
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- W1964735178 doi "https://doi.org/10.1016/0040-6090(93)90736-9" @default.
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