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- W1964781632 abstract "We have developed a novel technique for performing simple phase-sensitive optical measurements in a sub-micrometer area. We presently use this technique to measure film stacks commonly found in the semiconductor industry. This article explains the theory behind this technique and presents several examples demonstrating the capabilities of the system." @default.
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- W1964781632 date "1994-03-01" @default.
- W1964781632 modified "2023-09-23" @default.
- W1964781632 title "<title>Novel technique for performing ellipsometric measurements in a submicrometer area</title>" @default.
- W1964781632 doi "https://doi.org/10.1117/12.172605" @default.
- W1964781632 hasPublicationYear "1994" @default.
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