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- W1964808766 abstract "The present capabilities of microlithography are discussed, with emphasis placed on resolution and pattern distortion. The current limits of optical reduction lithography, electron beam lithography, and optical and x-ray proximity printing are presented. It is shown that currently the major factor limiting resolution in electron beam lithography is electron scattering in the resist and substrate. Recent progress in the theoretical understanding of this scattering limit is discussed, and new techniques for reducing the resolution degradation caused by this scattering are described." @default.
- W1964808766 created "2016-06-24" @default.
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- W1964808766 date "1982-03-24" @default.
- W1964808766 modified "2023-09-23" @default.
- W1964808766 title "<title>Status Of Microstructure Fabrication</title>" @default.
- W1964808766 doi "https://doi.org/10.1117/12.933143" @default.
- W1964808766 hasPublicationYear "1982" @default.
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