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- W1964853668 abstract "A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent." @default.
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- W1964853668 date "1999-09-01" @default.
- W1964853668 modified "2023-09-27" @default.
- W1964853668 title "Surface profile measurement using a unique microtube-based system" @default.
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- W1964853668 doi "https://doi.org/10.1016/s0030-4018(99)00334-x" @default.
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