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- W1965014080 abstract "The mechanism of resist-mask distortion during a resist trimming process was investigated experimentally. It was found that oxygen-radical irradiation creates a degraded layer on the resist surface and causes compressive stress. Non-uniform spatial distribution of oxygen radicals, therefore, causes asymmetrical irradiation of the radicals and makes an unbalanced or asymmetrical stress field on the resist-mask surface. Such an asymmetrical stress field results in the distortion of a resist mask." @default.
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- W1965014080 date "2009-10-02" @default.
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- W1965014080 title "Investigation of Mask Deformation by Oxygen-Radical Irradiation during Resist Trimming" @default.
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- W1965014080 doi "https://doi.org/10.1143/apex.2.106501" @default.
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