Matches in SemOpenAlex for { <https://semopenalex.org/work/W1965070282> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W1965070282 abstract "Full wafer dual beam FIB-SEM systems have received a lot of industrial interest in the last years and by now are operational in several 200mm and 300mm fabs. These tools offer a 3D-physical characterization capability of defects and device structures and as such allow for more rapid yield learning and increased process control. Moreover, if SEM resolution is insufficient to reveal defect origin or the necessary process details, it is now also possible to prepare TEM samples using a controlled, easy to learn in-situ process and to efficiently continue the characterization with a high resolution TEM inspection. Thanks to latest hardware developments and the high degree of automation of this TEM sample preparation process, wafers no longer need to be broken and remain essentially free from contamination. Hence, the TEM lamella process can be considered as non-destructive and wafers may continue the fabrication process flow. In this paper we examine the SEM and TEM application capabilities offered by in-line dual beam systems. To qualify the wafer return strategy, the particle contamination generated by the system hardware as well as the process-induced contamination have been investigated. The particle levels measured are fully acceptable to adopt the wafer return strategy. Ga-contamination does exist but is sufficiently low and localized so that the wafer return strategy can be applied safely in the back-end of line process. Yield analysis has confirmed that there is no measurable impact on device yield. Although yet to be proven for the frond-end of line processes, the wafer return strategy has been demonstrated as a valuable one already in the backend of line processes. The as developed non-destructive 3-D SEM-TEM characterization capability does offer value added data that allow to determine the root cause of critical process defects in almost real-time and this for both standard (SEM) and more advanced (TEM) technologies." @default.
- W1965070282 created "2016-06-24" @default.
- W1965070282 creator A5006360210 @default.
- W1965070282 creator A5014345896 @default.
- W1965070282 creator A5020063207 @default.
- W1965070282 creator A5020620387 @default.
- W1965070282 creator A5035064658 @default.
- W1965070282 creator A5037041195 @default.
- W1965070282 creator A5042176371 @default.
- W1965070282 creator A5061358170 @default.
- W1965070282 creator A5064376235 @default.
- W1965070282 creator A5072959959 @default.
- W1965070282 creator A5075890268 @default.
- W1965070282 creator A5081854726 @default.
- W1965070282 date "2006-03-10" @default.
- W1965070282 modified "2023-10-10" @default.
- W1965070282 title "In-line TEM sample preparation and wafer return strategy for rapid yield learning" @default.
- W1965070282 doi "https://doi.org/10.1117/12.656410" @default.
- W1965070282 hasPublicationYear "2006" @default.
- W1965070282 type Work @default.
- W1965070282 sameAs 1965070282 @default.
- W1965070282 citedByCount "4" @default.
- W1965070282 countsByYear W19650702822015 @default.
- W1965070282 countsByYear W19650702822016 @default.
- W1965070282 countsByYear W19650702822020 @default.
- W1965070282 crossrefType "proceedings-article" @default.
- W1965070282 hasAuthorship W1965070282A5006360210 @default.
- W1965070282 hasAuthorship W1965070282A5014345896 @default.
- W1965070282 hasAuthorship W1965070282A5020063207 @default.
- W1965070282 hasAuthorship W1965070282A5020620387 @default.
- W1965070282 hasAuthorship W1965070282A5035064658 @default.
- W1965070282 hasAuthorship W1965070282A5037041195 @default.
- W1965070282 hasAuthorship W1965070282A5042176371 @default.
- W1965070282 hasAuthorship W1965070282A5061358170 @default.
- W1965070282 hasAuthorship W1965070282A5064376235 @default.
- W1965070282 hasAuthorship W1965070282A5072959959 @default.
- W1965070282 hasAuthorship W1965070282A5075890268 @default.
- W1965070282 hasAuthorship W1965070282A5081854726 @default.
- W1965070282 hasConcept C111919701 @default.
- W1965070282 hasConcept C127413603 @default.
- W1965070282 hasConcept C136525101 @default.
- W1965070282 hasConcept C142724271 @default.
- W1965070282 hasConcept C160671074 @default.
- W1965070282 hasConcept C171250308 @default.
- W1965070282 hasConcept C192562407 @default.
- W1965070282 hasConcept C204787440 @default.
- W1965070282 hasConcept C21880701 @default.
- W1965070282 hasConcept C2780841128 @default.
- W1965070282 hasConcept C35750839 @default.
- W1965070282 hasConcept C41008148 @default.
- W1965070282 hasConcept C71924100 @default.
- W1965070282 hasConcept C98045186 @default.
- W1965070282 hasConceptScore W1965070282C111919701 @default.
- W1965070282 hasConceptScore W1965070282C127413603 @default.
- W1965070282 hasConceptScore W1965070282C136525101 @default.
- W1965070282 hasConceptScore W1965070282C142724271 @default.
- W1965070282 hasConceptScore W1965070282C160671074 @default.
- W1965070282 hasConceptScore W1965070282C171250308 @default.
- W1965070282 hasConceptScore W1965070282C192562407 @default.
- W1965070282 hasConceptScore W1965070282C204787440 @default.
- W1965070282 hasConceptScore W1965070282C21880701 @default.
- W1965070282 hasConceptScore W1965070282C2780841128 @default.
- W1965070282 hasConceptScore W1965070282C35750839 @default.
- W1965070282 hasConceptScore W1965070282C41008148 @default.
- W1965070282 hasConceptScore W1965070282C71924100 @default.
- W1965070282 hasConceptScore W1965070282C98045186 @default.
- W1965070282 hasLocation W19650702821 @default.
- W1965070282 hasOpenAccess W1965070282 @default.
- W1965070282 hasPrimaryLocation W19650702821 @default.
- W1965070282 hasRelatedWork W2068932340 @default.
- W1965070282 hasRelatedWork W2098136697 @default.
- W1965070282 hasRelatedWork W2129604708 @default.
- W1965070282 hasRelatedWork W2604145681 @default.
- W1965070282 hasRelatedWork W2622905748 @default.
- W1965070282 hasRelatedWork W2754462113 @default.
- W1965070282 hasRelatedWork W2905286381 @default.
- W1965070282 hasRelatedWork W4240308501 @default.
- W1965070282 hasRelatedWork W4247052665 @default.
- W1965070282 hasRelatedWork W4252587591 @default.
- W1965070282 isParatext "false" @default.
- W1965070282 isRetracted "false" @default.
- W1965070282 magId "1965070282" @default.
- W1965070282 workType "article" @default.