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- W1965118102 abstract "In this paper, a behavioral model that includes the influence of etching defects on the sensitivity of MEMS convective accelerometers is presented. Starting from an existing behavioral model, new physically-based expressions have been derived to introduce etching defects in the simulation of thermal conduction in the sensor. In addition, a semi-empirical model has been introduced for thermal convection. Finally, a very good agreement is obtained between the behavioral model and FEM simulations." @default.
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- W1965118102 date "2010-06-01" @default.
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- W1965118102 title "Modeling the influence of etching defects on the sensitivity of MEMS convective accelerometers" @default.
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- W1965118102 doi "https://doi.org/10.1109/ims3tw.2010.5503011" @default.
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