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- W1965348533 abstract "High power RF MEMS switches have been designed and fabricated. The switches are composed of a matrix of ohmic contact cantilevers and bridges. Optimized fabrication processes have been developed to improve planarization on contact surface and reduce residual stress in switch beams, which ensure a reasonable flat and smooth cantilever and membrane bridge for operation at high RF power and low actuation voltage." @default.
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- W1965348533 date "2006-04-01" @default.
- W1965348533 modified "2023-09-26" @default.
- W1965348533 title "Fabrication of high power RF MEMS switches" @default.
- W1965348533 cites W2020772091 @default.
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- W1965348533 doi "https://doi.org/10.1016/j.mee.2006.01.067" @default.
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