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- W1965431036 abstract "We discuss the calculation and effect of rigid-body- perturbation misalignment modes in two off-axis extreme- ultraviolet lithography projection cameras: a 4-mirror, 0.14-numerical-aperture (NA) design and a 6-mirror, NA equals 0.2 design. Two sets of modes are considered: (1) modes associated with camera distortion within the design ring field of view and (2) modes associated with camera exit- pupil wavefront 632.8-nm-light metrology data. We show that in the case of the 4-mirror design, a significant distortion misalignment mode coincides with a difficult-to-detect metrology misalignment mode." @default.
- W1965431036 created "2016-06-24" @default.
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- W1965431036 date "1998-09-21" @default.
- W1965431036 modified "2023-09-27" @default.
- W1965431036 title "Misalignment modes in off-axis lithography projection cameras" @default.
- W1965431036 doi "https://doi.org/10.1117/12.322071" @default.
- W1965431036 hasPublicationYear "1998" @default.
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