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• W1965507993 abstract "High-Tc superconducting YBa2Cu3O7−δ films have been prepared by low-pressure organometallic chemical vapor deposition using Cu(acetylacetonate)2, Y(dipivaloylmethanate)3, and Ba(dipivaloylmethanate)2 as volatile metal-organic precursors. An argon carrier gas is employed and water vapor serves as the reactant. Film growth rates of 10–30 nm min-1 are achieved at a system pressure of 5 torr. After annealing under oxygen, the YBa2Cu3O7−δ films deposited on SrTiO3 exhibit excellent compositional and structural uniformity in addition to preferential orientation of crystalline c axes perpendicular to the SrTiO3 surface. The onset of superconductivity is at ca. 90 K and zero resistance is achieved by 47 K." @default.
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• W1965507993 date "1989-01-01" @default.
• W1965507993 modified "2023-09-26" @default.
• W1965507993 title "Low pressure organometallic chemical vapor deposition of high-Tc superconducting YBa2Cu3O7−δ films" @default.
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• W1965507993 doi "https://doi.org/10.1016/0038-1098(89)90389-x" @default.
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