Matches in SemOpenAlex for { <https://semopenalex.org/work/W1965589890> ?p ?o ?g. }
- W1965589890 endingPage "23" @default.
- W1965589890 startingPage "8" @default.
- W1965589890 abstract "Purpose – The processing techniques and materials utilized in the fabrication of a two-terminal electrostatically actuated micro-electro-mechanical cantilever-arrayed device used for radio frequency tuning applications are presented in this work. The paper aims to discuss these issues. Design/methodology/approach – The process, which is based on silicon surface micromachining, uses spin-coated photoresist as the sacrificial layer underneath the electroplated gold structural material and an insulating layer of silicon dioxide, deposited using plasma enhanced chemical vapour deposition (PECVD), to avoid a short circuit between the cantilever and the bottom electrode in a total of six major fabrication steps. These included the PECVD of the silicon dioxide insulating layer, optical lithography to transfer photomask layer patterns, vacuum evaporation to deposit thin films of titanium (Ti) and gold (Au), electroplating of Au, the dry release of the cantilever beam arrays, and finally the wafer dicing to split the different micro devices. These process steps were each sub-detailed to give a total of 14 micro-fabrication processes. Findings – Scanning electron microscope images taken on the final fabricated device that was dry released using oxygen plasma ashing to avoid stiction showed 12 freely suspended micro-cantilevered beams suspended with an average electrostatic gap of 2.29±0.17 μm above a 4,934±3 Å thick silicon dioxide layer. Preliminary dimensional measurements on the fabricated devices revealed that the cantilevers were at least 52.06±1.93 μm wide with lengths varying from 377.97±0.01 to 1,491.89±0.01 μm and were at least 2.21±0.05 μm thick. Originality/value – The cantilever beams used in this work were manufactured using electroplated gold, and photoresist was used as a sacrificial layer underneath the beams. Plasma ashing was used to release the beams. The beams were anchored to a central electrode and each beam was designed with varying length." @default.
- W1965589890 created "2016-06-24" @default.
- W1965589890 creator A5038853251 @default.
- W1965589890 date "2013-12-20" @default.
- W1965589890 modified "2023-09-27" @default.
- W1965589890 title "Fabrication of a micro-cantilever gold plated beams array" @default.
- W1965589890 cites W1525664030 @default.
- W1965589890 cites W1594489858 @default.
- W1965589890 cites W1956632361 @default.
- W1965589890 cites W1968516632 @default.
- W1965589890 cites W1975926196 @default.
- W1965589890 cites W1991148392 @default.
- W1965589890 cites W1992805961 @default.
- W1965589890 cites W1996575704 @default.
- W1965589890 cites W2000130662 @default.
- W1965589890 cites W2001458265 @default.
- W1965589890 cites W2014963743 @default.
- W1965589890 cites W2015749539 @default.
- W1965589890 cites W2015946765 @default.
- W1965589890 cites W2016277920 @default.
- W1965589890 cites W2032299735 @default.
- W1965589890 cites W2046453004 @default.
- W1965589890 cites W2047180748 @default.
- W1965589890 cites W2049705617 @default.
- W1965589890 cites W2051793268 @default.
- W1965589890 cites W2059165754 @default.
- W1965589890 cites W2080243065 @default.
- W1965589890 cites W2096372126 @default.
- W1965589890 cites W2098927684 @default.
- W1965589890 cites W2105119424 @default.
- W1965589890 cites W2114209226 @default.
- W1965589890 cites W2118607301 @default.
- W1965589890 cites W2121147900 @default.
- W1965589890 cites W2122448988 @default.
- W1965589890 cites W2125648156 @default.
- W1965589890 cites W2137178805 @default.
- W1965589890 cites W2137252180 @default.
- W1965589890 cites W2137444785 @default.
- W1965589890 cites W2148672270 @default.
- W1965589890 cites W2155717529 @default.
- W1965589890 cites W2162074619 @default.
- W1965589890 cites W2169856829 @default.
- W1965589890 cites W2261025968 @default.
- W1965589890 cites W2475485802 @default.
- W1965589890 cites W2476858967 @default.
- W1965589890 cites W3022299620 @default.
- W1965589890 doi "https://doi.org/10.1108/mi-12-2012-0083" @default.
- W1965589890 hasPublicationYear "2013" @default.
- W1965589890 type Work @default.
- W1965589890 sameAs 1965589890 @default.
- W1965589890 citedByCount "0" @default.
- W1965589890 crossrefType "journal-article" @default.
- W1965589890 hasAuthorship W1965589890A5038853251 @default.
- W1965589890 hasConcept C100460472 @default.
- W1965589890 hasConcept C105487726 @default.
- W1965589890 hasConcept C110339231 @default.
- W1965589890 hasConcept C1291036 @default.
- W1965589890 hasConcept C134406635 @default.
- W1965589890 hasConcept C136525101 @default.
- W1965589890 hasConcept C141354745 @default.
- W1965589890 hasConcept C142724271 @default.
- W1965589890 hasConcept C145667562 @default.
- W1965589890 hasConcept C159985019 @default.
- W1965589890 hasConcept C160671074 @default.
- W1965589890 hasConcept C171250308 @default.
- W1965589890 hasConcept C192562407 @default.
- W1965589890 hasConcept C204787440 @default.
- W1965589890 hasConcept C2779227376 @default.
- W1965589890 hasConcept C37977207 @default.
- W1965589890 hasConcept C38347018 @default.
- W1965589890 hasConcept C49040817 @default.
- W1965589890 hasConcept C51807945 @default.
- W1965589890 hasConcept C544956773 @default.
- W1965589890 hasConcept C71924100 @default.
- W1965589890 hasConceptScore W1965589890C100460472 @default.
- W1965589890 hasConceptScore W1965589890C105487726 @default.
- W1965589890 hasConceptScore W1965589890C110339231 @default.
- W1965589890 hasConceptScore W1965589890C1291036 @default.
- W1965589890 hasConceptScore W1965589890C134406635 @default.
- W1965589890 hasConceptScore W1965589890C136525101 @default.
- W1965589890 hasConceptScore W1965589890C141354745 @default.
- W1965589890 hasConceptScore W1965589890C142724271 @default.
- W1965589890 hasConceptScore W1965589890C145667562 @default.
- W1965589890 hasConceptScore W1965589890C159985019 @default.
- W1965589890 hasConceptScore W1965589890C160671074 @default.
- W1965589890 hasConceptScore W1965589890C171250308 @default.
- W1965589890 hasConceptScore W1965589890C192562407 @default.
- W1965589890 hasConceptScore W1965589890C204787440 @default.
- W1965589890 hasConceptScore W1965589890C2779227376 @default.
- W1965589890 hasConceptScore W1965589890C37977207 @default.
- W1965589890 hasConceptScore W1965589890C38347018 @default.
- W1965589890 hasConceptScore W1965589890C49040817 @default.
- W1965589890 hasConceptScore W1965589890C51807945 @default.
- W1965589890 hasConceptScore W1965589890C544956773 @default.
- W1965589890 hasConceptScore W1965589890C71924100 @default.
- W1965589890 hasIssue "1" @default.
- W1965589890 hasLocation W19655898901 @default.
- W1965589890 hasOpenAccess W1965589890 @default.