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- W1965605797 abstract "The production of advanced microchips by x-ray lithography seems likely to become the first large-scale industrial application of synchrotron radiation. Of all the possible x-ray sources, only storage rings have sufficent power to achieve economic throughputs. For this reason, many rings have been and are being built worldwide for lithography. Superconducting rings are preferred because their higher magnetic fields make them more compact." @default.
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- W1965605797 date "1992-01-01" @default.
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- W1965605797 title "Superconducting compact sources for lithography (invited)" @default.
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- W1965605797 doi "https://doi.org/10.1063/1.1142643" @default.
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