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• W1965718757 abstract "We demonstrate a new method for imaging vertical and near vertical surface features by atomic force microscopy (AFM). It is based on an attractive force mode AFM, equipped with a special boot‐shaped tip, coupled with a measurement of slope and with a special tracking technique. Surface profiling is achieved through a novel servo and scanning system. Mapping sidewall profile opens the door to measurement of critical dimensions (width and wall angles) of lines and trenches in integrated circuits, with high accuracy." @default.
• W1965718757 created "2016-06-24" @default.
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• W1965718757 date "1994-05-09" @default.
• W1965718757 modified "2023-09-26" @default.
• W1965718757 title "Method for imaging sidewalls by atomic force microscopy" @default.
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• W1965718757 doi "https://doi.org/10.1063/1.111578" @default.
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