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- W1965722892 endingPage "880" @default.
- W1965722892 startingPage "877" @default.
- W1965722892 abstract "In thermal nanoimprint lithography (NIL), one of the key points to be addressed is the printing uniformity on large areas. During the process, the silicon stamp undergoes significant mechanical stress, function of different parameters and appear under the concurrent influence of both the applied pressure on the backside of the stamp and an opposite force due to the polymer viscoelastic behaviour. It leads to non-negligible deformations within patterned or unpatterned areas, which translates into non uniformity of the printing, stamp pattern break and degradation of the polymer surface. This work studies the relation between the residual layer thickness (RLT) and the patterned area size, fill factor (FF) and stamp thickness (ST) for stamps made in silicon. Important and different variations in the homogeneity of the residual layer are obtained in comparison with the values predicted by the theory. This will help to optimize stamp designs and choose appropriate process setups and parameters for nanoimprint with improved pattern transfer capability." @default.
- W1965722892 created "2016-06-24" @default.
- W1965722892 creator A5000161984 @default.
- W1965722892 creator A5053455606 @default.
- W1965722892 creator A5071779530 @default.
- W1965722892 creator A5077619374 @default.
- W1965722892 date "2008-05-01" @default.
- W1965722892 modified "2023-10-18" @default.
- W1965722892 title "Stamp deformation and its influence on residual layer homogeneity in thermal nanoimprint lithography" @default.
- W1965722892 cites W2034245450 @default.
- W1965722892 cites W2062074587 @default.
- W1965722892 cites W2074634508 @default.
- W1965722892 cites W2122663084 @default.
- W1965722892 doi "https://doi.org/10.1016/j.mee.2008.01.045" @default.
- W1965722892 hasPublicationYear "2008" @default.
- W1965722892 type Work @default.
- W1965722892 sameAs 1965722892 @default.
- W1965722892 citedByCount "12" @default.
- W1965722892 countsByYear W19657228922012 @default.
- W1965722892 countsByYear W19657228922013 @default.
- W1965722892 countsByYear W19657228922015 @default.
- W1965722892 countsByYear W19657228922016 @default.
- W1965722892 countsByYear W19657228922018 @default.
- W1965722892 crossrefType "journal-article" @default.
- W1965722892 hasAuthorship W1965722892A5000161984 @default.
- W1965722892 hasAuthorship W1965722892A5053455606 @default.
- W1965722892 hasAuthorship W1965722892A5071779530 @default.
- W1965722892 hasAuthorship W1965722892A5077619374 @default.
- W1965722892 hasConcept C11413529 @default.
- W1965722892 hasConcept C119857082 @default.
- W1965722892 hasConcept C121332964 @default.
- W1965722892 hasConcept C136525101 @default.
- W1965722892 hasConcept C142259097 @default.
- W1965722892 hasConcept C142724271 @default.
- W1965722892 hasConcept C153294291 @default.
- W1965722892 hasConcept C155512373 @default.
- W1965722892 hasConcept C159985019 @default.
- W1965722892 hasConcept C171250308 @default.
- W1965722892 hasConcept C192562407 @default.
- W1965722892 hasConcept C204223013 @default.
- W1965722892 hasConcept C204530211 @default.
- W1965722892 hasConcept C204787440 @default.
- W1965722892 hasConcept C2776226143 @default.
- W1965722892 hasConcept C2777046567 @default.
- W1965722892 hasConcept C2779227376 @default.
- W1965722892 hasConcept C37292000 @default.
- W1965722892 hasConcept C41008148 @default.
- W1965722892 hasConcept C49040817 @default.
- W1965722892 hasConcept C544956773 @default.
- W1965722892 hasConcept C71924100 @default.
- W1965722892 hasConceptScore W1965722892C11413529 @default.
- W1965722892 hasConceptScore W1965722892C119857082 @default.
- W1965722892 hasConceptScore W1965722892C121332964 @default.
- W1965722892 hasConceptScore W1965722892C136525101 @default.
- W1965722892 hasConceptScore W1965722892C142259097 @default.
- W1965722892 hasConceptScore W1965722892C142724271 @default.
- W1965722892 hasConceptScore W1965722892C153294291 @default.
- W1965722892 hasConceptScore W1965722892C155512373 @default.
- W1965722892 hasConceptScore W1965722892C159985019 @default.
- W1965722892 hasConceptScore W1965722892C171250308 @default.
- W1965722892 hasConceptScore W1965722892C192562407 @default.
- W1965722892 hasConceptScore W1965722892C204223013 @default.
- W1965722892 hasConceptScore W1965722892C204530211 @default.
- W1965722892 hasConceptScore W1965722892C204787440 @default.
- W1965722892 hasConceptScore W1965722892C2776226143 @default.
- W1965722892 hasConceptScore W1965722892C2777046567 @default.
- W1965722892 hasConceptScore W1965722892C2779227376 @default.
- W1965722892 hasConceptScore W1965722892C37292000 @default.
- W1965722892 hasConceptScore W1965722892C41008148 @default.
- W1965722892 hasConceptScore W1965722892C49040817 @default.
- W1965722892 hasConceptScore W1965722892C544956773 @default.
- W1965722892 hasConceptScore W1965722892C71924100 @default.
- W1965722892 hasIssue "5-6" @default.
- W1965722892 hasLocation W19657228921 @default.
- W1965722892 hasOpenAccess W1965722892 @default.
- W1965722892 hasPrimaryLocation W19657228921 @default.
- W1965722892 hasRelatedWork W1538953426 @default.
- W1965722892 hasRelatedWork W1828786436 @default.
- W1965722892 hasRelatedWork W1830089573 @default.
- W1965722892 hasRelatedWork W1990183141 @default.
- W1965722892 hasRelatedWork W2003891573 @default.
- W1965722892 hasRelatedWork W2067116090 @default.
- W1965722892 hasRelatedWork W2411643189 @default.
- W1965722892 hasRelatedWork W2968272078 @default.
- W1965722892 hasRelatedWork W4233359233 @default.
- W1965722892 hasRelatedWork W4385442490 @default.
- W1965722892 hasVolume "85" @default.
- W1965722892 isParatext "false" @default.
- W1965722892 isRetracted "false" @default.
- W1965722892 magId "1965722892" @default.
- W1965722892 workType "article" @default.