Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966098569> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W1966098569 abstract "Summary form only given.Our studies utilized a fluorine laser (Lambda Physik NovaLine F600) with more than 20 mJ/ pulse at 600 Hz. The samples were machined by mask imaging. Since radiation at 157 nm is strongly absorbed by oxygen and water vapor, we evacuated the beam path from the output coupler to the objective lens and purged (N/sub 2/) the path between the objective lens and the sample. As a fluorine laser is electrically and mechanically similar to an excimer, we employed an ArF mix into the fluorine laser in order to keep all aspects of the setup equal. We produced features at a fixed fluence of 6.5 J/cm/sup 2/, examined the smoothness of the ablated area, the edge quality and the surrounding material for damage resulting from thermal loading." @default.
- W1966098569 created "2016-06-24" @default.
- W1966098569 creator A5021086738 @default.
- W1966098569 creator A5042138714 @default.
- W1966098569 creator A5058570967 @default.
- W1966098569 creator A5090260475 @default.
- W1966098569 date "2000-01-01" @default.
- W1966098569 modified "2023-09-27" @default.
- W1966098569 title "Micromachining results using industrial fluorine lasers at 157 nm" @default.
- W1966098569 doi "https://doi.org/10.1109/cleo.2000.907416" @default.
- W1966098569 hasPublicationYear "2000" @default.
- W1966098569 type Work @default.
- W1966098569 sameAs 1966098569 @default.
- W1966098569 citedByCount "0" @default.
- W1966098569 crossrefType "proceedings-article" @default.
- W1966098569 hasAuthorship W1966098569A5021086738 @default.
- W1966098569 hasAuthorship W1966098569A5042138714 @default.
- W1966098569 hasAuthorship W1966098569A5058570967 @default.
- W1966098569 hasAuthorship W1966098569A5090260475 @default.
- W1966098569 hasConcept C120665830 @default.
- W1966098569 hasConcept C121332964 @default.
- W1966098569 hasConcept C136525101 @default.
- W1966098569 hasConcept C142724271 @default.
- W1966098569 hasConcept C145667562 @default.
- W1966098569 hasConcept C15336307 @default.
- W1966098569 hasConcept C153385146 @default.
- W1966098569 hasConcept C191897082 @default.
- W1966098569 hasConcept C192562407 @default.
- W1966098569 hasConcept C204787440 @default.
- W1966098569 hasConcept C22078206 @default.
- W1966098569 hasConcept C2778386843 @default.
- W1966098569 hasConcept C2780477314 @default.
- W1966098569 hasConcept C2984025587 @default.
- W1966098569 hasConcept C49040817 @default.
- W1966098569 hasConcept C506198293 @default.
- W1966098569 hasConcept C520434653 @default.
- W1966098569 hasConcept C71924100 @default.
- W1966098569 hasConceptScore W1966098569C120665830 @default.
- W1966098569 hasConceptScore W1966098569C121332964 @default.
- W1966098569 hasConceptScore W1966098569C136525101 @default.
- W1966098569 hasConceptScore W1966098569C142724271 @default.
- W1966098569 hasConceptScore W1966098569C145667562 @default.
- W1966098569 hasConceptScore W1966098569C15336307 @default.
- W1966098569 hasConceptScore W1966098569C153385146 @default.
- W1966098569 hasConceptScore W1966098569C191897082 @default.
- W1966098569 hasConceptScore W1966098569C192562407 @default.
- W1966098569 hasConceptScore W1966098569C204787440 @default.
- W1966098569 hasConceptScore W1966098569C22078206 @default.
- W1966098569 hasConceptScore W1966098569C2778386843 @default.
- W1966098569 hasConceptScore W1966098569C2780477314 @default.
- W1966098569 hasConceptScore W1966098569C2984025587 @default.
- W1966098569 hasConceptScore W1966098569C49040817 @default.
- W1966098569 hasConceptScore W1966098569C506198293 @default.
- W1966098569 hasConceptScore W1966098569C520434653 @default.
- W1966098569 hasConceptScore W1966098569C71924100 @default.
- W1966098569 hasLocation W19660985691 @default.
- W1966098569 hasOpenAccess W1966098569 @default.
- W1966098569 hasPrimaryLocation W19660985691 @default.
- W1966098569 hasRelatedWork W1954512750 @default.
- W1966098569 hasRelatedWork W1989385094 @default.
- W1966098569 hasRelatedWork W2001565184 @default.
- W1966098569 hasRelatedWork W2004016382 @default.
- W1966098569 hasRelatedWork W2014210117 @default.
- W1966098569 hasRelatedWork W2014702337 @default.
- W1966098569 hasRelatedWork W2028372613 @default.
- W1966098569 hasRelatedWork W2034264530 @default.
- W1966098569 hasRelatedWork W2043812375 @default.
- W1966098569 hasRelatedWork W2048597004 @default.
- W1966098569 hasRelatedWork W2062315965 @default.
- W1966098569 hasRelatedWork W2063418075 @default.
- W1966098569 hasRelatedWork W2075113125 @default.
- W1966098569 hasRelatedWork W2080180883 @default.
- W1966098569 hasRelatedWork W2092349774 @default.
- W1966098569 hasRelatedWork W2213206866 @default.
- W1966098569 hasRelatedWork W2322322182 @default.
- W1966098569 hasRelatedWork W3150024814 @default.
- W1966098569 hasRelatedWork W3198945108 @default.
- W1966098569 hasRelatedWork W2141482308 @default.
- W1966098569 isParatext "false" @default.
- W1966098569 isRetracted "false" @default.
- W1966098569 magId "1966098569" @default.
- W1966098569 workType "article" @default.