Matches in SemOpenAlex for { <https://semopenalex.org/work/W1966170003> ?p ?o ?g. }
- W1966170003 endingPage "3915" @default.
- W1966170003 startingPage "3915" @default.
- W1966170003 abstract "Molybdenum (Mo) film as a gate electrode for high-frequency power metal oxide semiconductor field effect transistor (MOSFET) has been investigated. The Mo films were deposited by sputtering in Ar ambient. The Mo films properties depend greatly on the substrate temperature. An accurate pattern was realized for Mo film. Stability and reliability of Mo gates for high-frequency power vertical double-diffused metal oxide semiconductor field effect transistors (VDMOSFETs) are as good as those of polysilicon gates. The shift of threshold voltage is below ±35 mV and the change of gate-source leakage current is less than 5 nA under the stress condition of ±5 MV/cm for 100 h at 250°C. Power gain and drain efficiency improvement of Mo gates for VDMOSFETs have been obtained." @default.
- W1966170003 created "2016-06-24" @default.
- W1966170003 creator A5005085096 @default.
- W1966170003 creator A5008078406 @default.
- W1966170003 creator A5022924920 @default.
- W1966170003 creator A5028251869 @default.
- W1966170003 creator A5047424393 @default.
- W1966170003 creator A5074089244 @default.
- W1966170003 date "2000-07-01" @default.
- W1966170003 modified "2023-09-25" @default.
- W1966170003 title "Molybdenum Film Technology For Power Metal Oxide Semiconductor Field Effect Transistor Gate Electrode Applications" @default.
- W1966170003 cites W1982636498 @default.
- W1966170003 cites W1987779598 @default.
- W1966170003 cites W2053306251 @default.
- W1966170003 cites W2082125022 @default.
- W1966170003 cites W2095096874 @default.
- W1966170003 cites W2143154790 @default.
- W1966170003 doi "https://doi.org/10.1143/jjap.39.3915" @default.
- W1966170003 hasPublicationYear "2000" @default.
- W1966170003 type Work @default.
- W1966170003 sameAs 1966170003 @default.
- W1966170003 citedByCount "4" @default.
- W1966170003 countsByYear W19661700032019 @default.
- W1966170003 crossrefType "journal-article" @default.
- W1966170003 hasAuthorship W1966170003A5005085096 @default.
- W1966170003 hasAuthorship W1966170003A5008078406 @default.
- W1966170003 hasAuthorship W1966170003A5022924920 @default.
- W1966170003 hasAuthorship W1966170003A5028251869 @default.
- W1966170003 hasAuthorship W1966170003A5047424393 @default.
- W1966170003 hasAuthorship W1966170003A5074089244 @default.
- W1966170003 hasConcept C108225325 @default.
- W1966170003 hasConcept C111368507 @default.
- W1966170003 hasConcept C119599485 @default.
- W1966170003 hasConcept C127313418 @default.
- W1966170003 hasConcept C127413603 @default.
- W1966170003 hasConcept C139719470 @default.
- W1966170003 hasConcept C145598152 @default.
- W1966170003 hasConcept C147789679 @default.
- W1966170003 hasConcept C162324750 @default.
- W1966170003 hasConcept C165801399 @default.
- W1966170003 hasConcept C171250308 @default.
- W1966170003 hasConcept C172385210 @default.
- W1966170003 hasConcept C17525397 @default.
- W1966170003 hasConcept C185592680 @default.
- W1966170003 hasConcept C19067145 @default.
- W1966170003 hasConcept C191897082 @default.
- W1966170003 hasConcept C192562407 @default.
- W1966170003 hasConcept C195370968 @default.
- W1966170003 hasConcept C22423302 @default.
- W1966170003 hasConcept C2361726 @default.
- W1966170003 hasConcept C2777042071 @default.
- W1966170003 hasConcept C2777289219 @default.
- W1966170003 hasConcept C2778413303 @default.
- W1966170003 hasConcept C49040817 @default.
- W1966170003 hasConcept C51140833 @default.
- W1966170003 hasConcept C549387045 @default.
- W1966170003 hasConceptScore W1966170003C108225325 @default.
- W1966170003 hasConceptScore W1966170003C111368507 @default.
- W1966170003 hasConceptScore W1966170003C119599485 @default.
- W1966170003 hasConceptScore W1966170003C127313418 @default.
- W1966170003 hasConceptScore W1966170003C127413603 @default.
- W1966170003 hasConceptScore W1966170003C139719470 @default.
- W1966170003 hasConceptScore W1966170003C145598152 @default.
- W1966170003 hasConceptScore W1966170003C147789679 @default.
- W1966170003 hasConceptScore W1966170003C162324750 @default.
- W1966170003 hasConceptScore W1966170003C165801399 @default.
- W1966170003 hasConceptScore W1966170003C171250308 @default.
- W1966170003 hasConceptScore W1966170003C172385210 @default.
- W1966170003 hasConceptScore W1966170003C17525397 @default.
- W1966170003 hasConceptScore W1966170003C185592680 @default.
- W1966170003 hasConceptScore W1966170003C19067145 @default.
- W1966170003 hasConceptScore W1966170003C191897082 @default.
- W1966170003 hasConceptScore W1966170003C192562407 @default.
- W1966170003 hasConceptScore W1966170003C195370968 @default.
- W1966170003 hasConceptScore W1966170003C22423302 @default.
- W1966170003 hasConceptScore W1966170003C2361726 @default.
- W1966170003 hasConceptScore W1966170003C2777042071 @default.
- W1966170003 hasConceptScore W1966170003C2777289219 @default.
- W1966170003 hasConceptScore W1966170003C2778413303 @default.
- W1966170003 hasConceptScore W1966170003C49040817 @default.
- W1966170003 hasConceptScore W1966170003C51140833 @default.
- W1966170003 hasConceptScore W1966170003C549387045 @default.
- W1966170003 hasIssue "7R" @default.
- W1966170003 hasLocation W19661700031 @default.
- W1966170003 hasOpenAccess W1966170003 @default.
- W1966170003 hasPrimaryLocation W19661700031 @default.
- W1966170003 hasRelatedWork W1613844570 @default.
- W1966170003 hasRelatedWork W2046631890 @default.
- W1966170003 hasRelatedWork W2322780449 @default.
- W1966170003 hasRelatedWork W2335244518 @default.
- W1966170003 hasRelatedWork W2595838235 @default.
- W1966170003 hasRelatedWork W2944272679 @default.
- W1966170003 hasRelatedWork W2965434912 @default.
- W1966170003 hasRelatedWork W3135781520 @default.
- W1966170003 hasRelatedWork W3171017009 @default.
- W1966170003 hasRelatedWork W4255027824 @default.
- W1966170003 hasVolume "39" @default.
- W1966170003 isParatext "false" @default.